Poster Session III (14:00-15:30)

POSTER · KWP

Presentations

  • Mass-spectroscopical study of plasma-assisted thermal degradation of poly(ethylene oxide)

    POSTER

    Authors

    • Andrei Choukourov

      Charles University in Prague, Faculty of Mathematics and Physics

    • Ivan Gordeev

      Charles University in Prague, Faculty of Mathematics and Physics

    • Dmitry Arzhakov

      Charles University in Prague, Faculty of Mathematics and Physics

    • Danka Slavinska

      Charles University in Prague, Faculty of Mathematics and Physics

    • Hynek Biederman

      Charles University in Prague, Faculty of Mathematics and Physics

    View abstract →

  • Plasma-cell interactions: apoptosis in cultured human breast cancer cells by a pulsed atmospheric pressure plasma jet

    POSTER

    Authors

    • Tae Hun Chung

      Dong-A University

    • Sun Ja Kim

      Dong-A University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Short time surface decontamination by nanosecond DBD plasma

    POSTER

    Authors

    • Hamid Ghomi

      Laser and Plasma Research Institute, Shahid Beheshti University, Evin1983963113, Tehran, Iran, Laser and Plasma Research Inst.

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Redox Characteristics of Thiol of Plants Using Radicals Produced by RF Discharge

    POSTER

    Authors

    • Akari Nakahigashi

      Saga University, Saga Universuty

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Sterilization of PET Bottles Using Air Torch Plasma Produced by Microwave Discharge

    POSTER

    Authors

    • Akari Nakahigashi

      Saga University, Saga Universuty

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Bacteria Inactivation Using Post-discharge Plasma in Atmospheric Pressure CO$_{2}$ and N$_{2}$-O$_{2}$

    POSTER

    Authors

    • Azadeh Valinataj Omran

    • Farshad Sohbatzadeh

    • Abasalt Hosseinzadeh Colagar

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Direct Measurement of Nitric Oxide Produced from Cell Under the Atmospheric Pressure Plasma Irradiation

    POSTER

    Authors

    • Takamichi Hirata

      Tokyo City University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Targeted cancer treatment using anti-EGFR and -TFR antibody conjugated gold nanoparticles stimulated by non-thermal air plasma

    POSTER

    Authors

    • Sang Rye Park

      Department of Oral Anatomy, School of Dentistry, Pusan National University, Pusan Natl Univ

    • Seoul Hee Nam

      Department of Oral Anatomy, School of Dentistry, Pusan National University

    • Jeong Hae Choi

      Department of Oral Anatomy, School of Dentistry, Pusan National University

    • Gyoo Cheon Kim

      Department of Oral Anatomy, School of Dentistry, Pusan National University, Pusan Natl Univ

    • Gon Jun Kim

      Department of Electronic and Electrical Engineering, Pohang University of Science and Technology

    • Jae Koo Lee

      Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang University

    View abstract →

  • DLC film coating for anti-infective property

    POSTER

    Authors

    • Masato Iwatsuki

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Cytocompatibility of DLC coating on a synthetic vascular graft

    POSTER

    Authors

    • Naoyuki Takeda

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Simulation of a inductively coupled hydrogen plasma for sterilization processes

    POSTER

    Authors

    • Max Engelhardt

      Ruhr University Bochum, Insitute for Plasma Technology, Germany

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Plasma Enhanced Chemical Vapour Deposition on Cylic Olefin Copolymers from Tetraethyl Orthosilicate and Acrylic Acid for Biosensor Applications

    POSTER

    Authors

    • Conor Coyle

      National Centre for Plasma Science and Technology (NCPST), Biomedical Diagnostics Institute (BDI)

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Study on atmospheric plasma jet irradiation to several micro organisms

    POSTER

    Authors

    • Yoshiaki Suda

      Sasebo National College of Technology

    • Yoshihito Yagyu

      Sasebo National College of Technology

    • Shouta Sakamoto

      Sasebo National College of Technology

    • Takashi Yamasaki

      Sasebo National College of Technology

    • Akari Nakahigashi

      Saga University, Saga Universuty

    • Hiroharu Kawasaki

      Sasebo National College of Technology

    • Tamiko Ohshima

      Sasebo National College of Technology

    View abstract →

  • Exposure of Plasmid DNA to cold atmospheric pressure plasmas

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Effects of Nitrogen and Oxygen Radicals on Low-temperature Bio-molecule Processing

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Bacteria inactivation effect of ions generated by dc corona discharge

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    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Flexible Control of Pulsed Power for Biomedical Applications using PC

    POSTER

    Authors

    • Masahiro Akiyama

      Kumamoto Universisty

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Decontamination of thermolabile medical goods in an industrial-grade setup: A parameter study

    ORAL

    Authors

    • Egmont Semmler

      Institute for Plasmatechnology, Ruhr-University Bochum, Institute for Plasma Technology, Ruhr-University Bochum

    • Benjamin Denis

      Institute for Plasmatechnology, Ruhr-University Bochum

    • Simon Steves

      Institute for Plasmatechnology, Ruhr-University Bochum, Ruhr-University Bochum, Institute for Plasma Technology, Germany

    • Nikita Bibinov

      Institute for Plasmatechnology, Ruhr-University Bochum

    • Peter Awakowicz

      Institute for Plasmatechnology, Ruhr-University Bochum, Institute for Plasma Technology, Ruhr-University Bochum, Germany, Institute for Plasma Technology, Ruhr-University Bochum

    • Wenzel Novak

      Groninger \& Co. GmbH

    View abstract →

  • Non-thermal Plasma Infection Control

    ORAL

    Authors

    • David Graves

      University of California at Berkeley, University of California, Berkeley

    • Mathew Pavlovitch

      University of California at Berkeley

    • Zhi Chen

      University of California at Berkeley

    • Douglas Clark

      University of California at Berkeley

    • Yukinori Sakiyama

      University of California at Berkeley, University of California, Berkeley

    View abstract →

  • The antimicrobial activity of an atmospheric pressure, room-temperature plasma in a simulated root canal infected with \textit{Enterococcus faecalis}

    ORAL

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Inactivation mechanism of \textit{Penicillium digitatum} spores by atmospheric pressure argon plasma

    ORAL

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Takayuki Ohta

      Faculty of Systems Engineering, Wakayama University, Wakayama University, Faculty of systems engineering, Wakayama University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Extracellular matrix patterning by atmospheric pressure plasma jets

    ORAL

    Authors

    • Ayumi Ando

      Osaka University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Electron emission characteristics of the single-grid ICP ion source with RF biasing

    POSTER

    Authors

    • Dmytro Rafalskyi

      V.N. Karazin Kharkiv National University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Design and experimental implementation of real time closed loop control of plasma processes

    POSTER

    Authors

    • Bernard Keville

      Dublin City University, NCPST, School of Physical Sciences, Dublin City University

    • Miles Turner

      Dublin City University, Dublin City University, Ireland, National Centre For Plasma Science and Technology, Dublin City University, Ireland, NCPST, Dublin City University, Dublin 9, Ireland, NCPST, School of Physical Sciences, DCU, NCPST, DCU

    • Yang Zhang

      Dublin City University, School of Electronic Engineering, DCU

    • Stephen Daniels

      Dublin City University, NCPST and School of Electronic Engineering, DCU, NCPST, DCU

    • Anthony Holohan

      Dublin City University, School of Electronic Engineering, DCU

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  • Effect of resistivity on Alfven Surface Waves Propagating Along Plasma-Vacuum Interface

    POSTER

    Authors

    • Nagendra Kumar

      M.M.H. College, Ghaziabad

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Himanshu Sikka

      Maharaja Agrasen Institute of Technology, Delhi

    View abstract →

  • Study on carbon nanotube preparation using arc discharge in liquid helium

    POSTER

    Authors

    • Hiroharu Kawasaki

      Sasebo National College of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Carbon Based Nanostructures via RF plasma in liquids

    POSTER

    Authors

    • Feisal Kroushawi

      Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Investigation of the temporal development of a spark channel in water

    POSTER

    Authors

    • Kyoung-Jae Chung

      Seoul National University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Y.S. Hwang

      Seoul National University

    View abstract →

  • Synthesis of sp$^{3}$ bonded carbon nano materials by supercritical fluid plasma

    POSTER

    Authors

    • Tomoki Shizuno

      Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Graduate School of Frontier Sciences, The University of Tokyo

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Laser ablation synthesis of nano-carbon materials in supercritical fluids

    POSTER

    Authors

    • Sho Nakahara

      Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Analysis of GaN damage induced by Cl$_{2}$/SiCl$_{4}$/Ar plasma

    POSTER

    Authors

    • Masaki Minami

      Sony Corp.

    • Shigetaka Tomiya

      Sony Shiroishi Semiconductor Inc.

    • Kenji Ishikawa

      Nagoya Univ., Nagoya University, Plasma Nanotechnology Research center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

    • Ryosuke Matsumoto

      Sony Shiroishi Semiconductor Inc.

    • Masanaga Fukasawa

      Sony Corp.

    • Fumikatsu Uesawa

      Sony Corp.

    • Masaru Hori

      Nagoya University, Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya Univ., Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603

    • Tetsuya Tatsumi

      Sony Corp.

    View abstract →

  • A Model for Effects of RF Bias Frequency and Waveform on Si Damaged-Layer Formation during Plasma Etching

    POSTER

    Authors

    • Koji Eriguchi

      Kyoto University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Study on modified surface layer of photoresist employing fluorocarbon ion beam and radicals

    ORAL

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Takuya Takeuchi

      Nagoya University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • 3-dimentional atomics-scale cellular model and feature profile evolution during Si etching in chlorine-based plasmas: Analysis of profile anomalies and surface roughness

    ORAL

    Authors

    • Hirotaka Tsuda

      Kyoto University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Optimization of STiGer process for silicon deep etching

    ORAL

    Authors

    • Thomas Tillocher

      GREMI

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Julien Ladroue

      GREMI - STMicroelectronics, GREMI

    • Philippe Lefaucheux

      GREMI

    • Mohamed Boufnichel

      STMicroelectronics

    • Pierre Ranson

      GREMI

    • R\'emi Dussart

      Universite d'Orleans, GREMI

    View abstract →

  • Damage diffusion model during alcohol-base plasma etching for magnetic materials

    ORAL

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Preparation of self-adhesive n-TiC/a-C:H coatings with internal layered structure by hybrid PVD-PECVD process

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Influences of Arc Discharge Repetition Rate on Growth of Ultrananocrystalline Diamond / Hydrogenated Amorphous Carbon Composite Films by a Coaxial Arc Plasma Gun

    POSTER

    Authors

    • Tomohiro Yoshida

      Kyushu University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Anisotropic ally Incident Effect of Sputtering Particles on the High Anisotropy Field of a CoFe Film in the Carrousel Sputtering Method

    POSTER

    Authors

    • R. Imaizumi

      Sojo University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • A comprehensive study of electron collisions with heavy noble gases

    POSTER

    Authors

    • M. Allan

      University of Fribourg

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • H. Hotop

      University of Kaiserslautern

    • O. Zatsarinny

      Drake University

    • K. Bartschat

      Drake University

    View abstract →

  • Development of a new set-up for total cross section measurement in the cold electron collision

    POSTER

    Authors

    • Manabu Kurokawa

      Department of Chemistry, Tokyo Institute of Technology

    • Masashi Kitajima

      Department of Chemistry, Tokyo Institute of Technology

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Differential and Integral cross sections for electronic-state excitation of O$_{2}$ by electron impact

    POSTER

    Authors

    • Daisuke Suzuki

      Sophia University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Elastic Differential Cross Sections for C$_{4}$F$_{6}$ by Low Energy Electron Impact

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Elastic Differential Cross Sections for XF$_{4}$ (X = C, Si, Ge) by Intermediate Energy Electron Impact

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Differential cross sections for electron scattering from vibrationally excited linear triatomic molecules

    POSTER

    Authors

    • Mizuha Ohkawa

      Sophia University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Electron collisions with Ar and N$_2$

    POSTER

    Authors

    • J.A. Young

      Jet Propulsion Laboratory

    • P.V. Johnson

      Jet Propulsion Laboratory

    • C.P. Malone

      Jet Propulsion Laboratory

    • I. Kanik

      Jet Propulsion Laboratory

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M.A. Khakoo

      California State University, Fullerton, California State University Fullerton

    View abstract →

  • The LXCat project

    POSTER

    Authors

    • Sergey Pancheshnyi

      LAPLACE, CNRS and University of Toulouse, France, LAPLACE-CNRS

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • An analytically solvable model to test the hyperspherical Sturmian approach for break up processes

    ORAL

    Authors

    • Gustavo Gasaneo

      Universidad Nacional del Sur, Bahia Blanca, Argentina

    • Dario Mitnik

      Universidad de Buenos Aires, Argentina

    • Lorenzo Ugo Ancarani

      Universite Paul Verlaine - Metz, France, Universite Paul Verlaine- Metz, France

    • Flavio Colavecchia

      Centro Atomico Bariloche, Argentina

    • Ana Laura Frapiccini

      Centro Atomico Bariloche, Argentina

    • Juan Martin Randazzo

      Centro Atomico Bariloche, Argentina

    View abstract →

  • Electron impact ionization in the Temkin Poet model with Sturmian functions

    ORAL

    Authors

    • Juan Martin Randazzo

      Centro Atomico Bariloche, Argentina

    • Ana Laura Frapiccini

      Centro Atomico Bariloche, Argentina

    • Gustavo Gasaneo

      Universidad Nacional del Sur, Bahia Blanca, Argentina

    • Dario Mitnik

      Universidad de Buenos Aires, Argentina

    • Lorenzo Ugo Ancarani

      Universite Paul Verlaine - Metz, France, Universite Paul Verlaine- Metz, France

    • Flavio Colavecchia

      Centro Atomico Bariloche, Argentina

    View abstract →

  • Electron Impact Single Ionization of Small Argon Clusters

    POSTER

    Authors

    • Thomas Pflueger

      Max-Planck-Institut fuer Kernphysik

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Alexander Dorn

      Max-Planck-Institut fuer Kernphysik

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    View abstract →

  • Energy dependent differential cross sections for C$_{60}$ by electron collision

    ORAL

    Authors

    • Satyendra Pal

      MMH College, Ghaziabad, MMH College

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Dissociative ionization cross sections for methyl halides by electron impact

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Satyendra Pal

      MMH College, Ghaziabad, MMH College

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  • Positron Interactions with Atoms and Molecules

    POSTER

    Authors

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Recoil-Ion Momentum Distribution in Positron-Impact Ionization Collisions

    POSTER

    Authors

    • R.O. Barrachina

      Centro Atomico Bariloche and Instituto Balseiro, Argentina

    • A. Delesque

      Ecole Nationale Superieure d Ingenieurs de Caen and Centre de Recherche, France

    • R. Tricard

      Ecole Nationale Superieure d Ingenieurs de Caen and Centre de Recherche, France

    • F.O. Navarrete

      Centro Atomico Bariloche and Instituto Balseiro, Argentina

    • R. Della Picca

      Centro Atomico Bariloche and Instituto Balseiro, Argentina

    • J. Fiol

      Centro Atomico Bariloche and Instituto Balseiro, Argentina

    • V.D. Rodriguez

      Departamento de Fisica and Instituto de Fisica de Buenos Aires, Argentina

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  • The Influence of the Spin Exchange and the Triple Nitrogen Atoms Recombination on the Magnetic Resonance Signal of Cesium Atoms in the N$_{2}$--Ar Afterglow

    POSTER

    Authors

    • Victor Kartoshkin

      Ioffe Physico-Technical Institute of the Russian Academy of Sciences

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Rotational and vibrational energy transfer in impulsive ion-molecule collisions

    POSTER

    Authors

    • Masato Nakamura

      Nihon University

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Growth of polycyclic aromatic hydrocarbons by ion-molecule reactions

    ORAL

    Authors

    • Daniela Ascenzi

      Department of Physics University of Trento, Department of Physics University of Trento Italy

    • Julia Aysina

      Department of Physics University of Trento

    • Paolo Tosi

      Department of Physics University of Trento, Department of Physics University of Trento Italy

    • Andrea Maranzana

      Department of Chemistry University of Torino

    • Glauco Tonachini

      Department of Chemistry University of Torino

    View abstract →

  • Oscillations in the wavelength distributions following photon interferences

    ORAL

    Authors

    • Francois Fremont

      Cimap, 6 bd du Mal Juin 14050 Caen Cedex France

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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  • Electron and Ion Reactions with ClN$_{3}$

    POSTER

    Authors

    • Thomas M. Miller

      Air Force Research Laboratory

    • Nicole Eyet

      Air Force Research Laboratory

    • Keith Freel

      Air Force Research Laboratory

    • Jeffrey F. Friedman

      Air Force Research Laboratory

    • Michael C. Heaven

      Air Force Research Laboratory

    • A.A. Viggiano

      Air Force Research Laboratory

    View abstract →

  • A Multiquantum State-to-State Database for Dissociation in Air Plasmas

    ORAL

    Authors

    • M\'ario Lino da Silva

      Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal

    • Vasco Guerra

      IPFN-LA, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fusao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, IPFN - Laboratorio Associado, IST, Lisboa, Portugal

    • Jorge Loureiro

      Instituto de Plasmas e Fus\~ao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal, Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, 1049-001, Lisboa, Portugal

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  • Spatiotemporal development of charged particle swarms in gases under the influence of electric and magnetic fields

    POSTER

    Authors

    • Sasa Dujko

      Centre for Mathematics and Computer Science (CWI), P.O.Box 94079, 1090 GB Amsterdam, The Netherlands, Centre for Mathematics and Computer Science (CWI), P.O. Box 94079, 1090 GB Amsterdam, The Netherlands

    • Zoran Raspopovic

      Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia

    • Ronald White

      ARC Centre for Antimatter-Matter Studies, School of Electrical Engineering and Physical Sciences, James Cook University, 4810 Townsville, Australia

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • Zoran Petrovic

      Institute of Physics, University of Belgrade, P.O.Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia, Institute of Physics Belgrade Serbia, Institute of Physics POB 68 11080 Zemun Serbia

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  • Formation of Non-Maxwellian, Non-Isotropic Electron Velocity Distribution Functions and Its Influence on Discharge Structure

    ORAL

    Authors

    • Igor D. Kaganovich

      Plasma Physics Laboratory, Princeton University, PPPL

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

    • M. Darnon

      ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

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