Electron Collision Cross Sections for ``Plasma-Like'' Gas Mixtures

Measurements of electron collision cross sections for a ``plasma-like'' gas mixture are presented. A gas target was prepared by thermally dissociating a CF$_{3}$I precursor to form a gas mixture containing species which are commonly observed in industrial plasmas. Products included stable molecules such as CF$_{3}$I, I$_{2}$ and C$_{2}$F$_{6}$, as well as neutral radicals such as CF$_{3}$ and I. Subsequently, the elastic differential cross sections for the gas mixture were measured for energies between 5 -- 50 eV. The measured data represents an important step towards the compilation of a sufficiently extensive database to meet the modeling needs of the low-temperature plasma industry.