On plasma based species deposition at a Pyrex surface studied by post plasma N$_{x}$O$_{y}$ conversion

The deposition of atomic species at the inner surface of a Pyrex tube RF plasma reactor was studied by measuring the time dependent conversion of N$_{x}$O$_{y}$ in a post plasma experiment. First the inner surface of the tube was treated by a capacitively coupled RF plasma with different precursors. Then following the plasma phase, after evacuation a gas mixture (1{\%} N$_{x}$O$_{y}$ in N$_{2})$ was filled into the tube. The time evolutions of NO, NO$_{2}$ and N$_{2}$O were measured using a 3 laser QCLAS system. It was found, that only after the usage of oxygen containing precursor gases NO was oxidised into NO$_{2}$. The N$_{2}$O concentration did not show any changes over time. A modelling approach showed good agreement with the experiment.