RF and Microwave-Driven Plasmas

ORAL · JW1

Presentations

  • Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas

    ORAL

    –

    Authors

    • Yu-Ru Zhang

      School of Physics and Optoelectronic Technology, Dalian University of Technology

    • Xiang Xu

      School of Physics and Optoelectronic Technology, Dalian University of Technology

    • Annemie Bogaerts

      Department of Chemistry, University of Antwerp

    • You-Nian Wang

      School of Physics and Optoelectronic Technology, Dalian University of Technology

    View abstract →

  • Electron Heating and Plasma Generation at Electrode Edge - Fluid and Kinetic Modeling

    ORAL

    –

    Authors

    • Shahid Rauf

      Applied Materials, Inc.

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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  • Experimental characterization of dual-frequency capacitively coupled plasmas

    ORAL

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    Authors

    • Yong-Xin Liu

      Dalian University of Technology

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    View abstract →

  • STUDENT AWARD FINALIST: Role of additional inductive power on the electron energy distribution in Ar/O2 capacitively coupled plasma

    ORAL

    –

    Authors

    • Hyo-Chang Lee

      Hanyang University, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • ChinWook Chung

      Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

    View abstract →

  • The Interaction of the Capacitive and Inductive Coupling Mechanisms with RF Substrate Bias

    ORAL

    –

    Authors

    • Shuxia Zhao

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    View abstract →

  • Atomic chlorine and electron densities in inductively-coupled plasmas in pure Cl2 : Comparison of numerical simulations with experiments

    ORAL

    –

    Authors

    • Pascal Chabert

      LPP Ecole Polytechnique - CNRS, LPP, CNRS-Ecole Polytechnique

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

    • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

      MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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  • Influence of capacitive bias on electron dynamics in an inductively coupled plasma

    ORAL

    –

    Authors

    • Mujahid Zaka-ul-Islam

      Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

    • Timo Gans

      York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DQ, UK, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, University of York, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

    • William Graham

      Queens University of Belfast, Queens University Belfast, Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

    • Kari niemi

      Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Belfast BT7 1NN, Northern Ireland, UK, Queens University Belfast, Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

    • Deborah O'Connell

      York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, University of York, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

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