Plasma Etching

Presentations

• Mechanism of Si and metal etching based on sticking reaction model

  COFFEE_KLATCH · Invited

  Nov. 17, 2011, 11:30 AM – Nov. 17, 2011, 12:00 PM

  Authors

  • Masaru Izawa

    Hitachi High-Technologies Corp.

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• Noninvasive sheath diagnostics in an inductively coupled plasma using a remote RF sensor

  ORAL

  Nov. 17, 2011, 12:00 PM – Nov. 17, 2011, 12:15 PM

  Authors

  • Satoru Kobayashi

    Applied Materials

  • Shahid Rauf

    Applied Materials

  • ken Collins

    Applied Materials

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• Mechanism for Plasma Etching of Shallow Trench Isolation Features in an Inductively Coupled Plasma

  ORAL

  Nov. 17, 2011, 12:15 PM – Nov. 17, 2011, 12:30 PM

  Authors

  • Ankur Agarwal

    Applied Materials Inc.

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Deposition Step in MEMS Time Multiplexed Etch

  ORAL

  Nov. 17, 2011, 12:30 PM – Nov. 17, 2011, 12:45 PM

  Authors

  • Lawrence Overzet

    University of Texas at Dallas

  • Iqbal Saraf

    University of Texas at Dallas

  • Matthew Goeckner

    University of Texas at Dallas

  View abstract →

• Study on modification process of photoresist by fluorocarbon ions and radicals

  ORAL

  Nov. 17, 2011, 12:45 PM – Nov. 17, 2011, 1:00 PM

  Authors

  • Takuya Takeuchi

    Nagoya University

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Mechanism of Highly Selective SiO$_{2}$ Etching over Si using New Alternative Gas, C$_{5}$HF$_{7}$

  ORAL

  Nov. 17, 2011, 1:00 PM – Nov. 17, 2011, 1:15 PM

  Authors

  • Yudai Miyawaki

    Nagoya University

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Exploring High AR 2$\mu $m TSV (25:1)

  ORAL

  Nov. 17, 2011, 1:15 PM – Nov. 17, 2011, 1:30 PM

  Authors

  • Maarten Kostermans

    imec

  • Ulrich Baier

    imec

  • Werner Boullart

    imec

  • Mohand Brouri

    Lam

  • Johan Vertommen

    Lam

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• 2D etch rate uniformity improvement in a parallel turn ICP system: numerical modeling and experiment

  ORAL

  Nov. 17, 2011, 1:30 PM – Nov. 17, 2011, 1:45 PM

  Authors

  • Junghoon Joo

    Kunsan National University

  View abstract →

• Simulation study of SF6 plasma etching in the GEC reference cell

  ORAL

  Nov. 17, 2011, 1:45 PM – Nov. 17, 2011, 2:00 PM

  Authors

  • Sergio Lopez-Lopez

    University College London and Quantemol Ltd.

  • Brent Walker

    University College London and Quantemol Ltd.

  • James Munro

    University College London and Quantemol Ltd.

  • Jonathan Tennyson

    University College London and Quantemol Ltd., University College London

  View abstract →

• Fourier Transform Infrared Absorption Spectroscopy of Gas-Phase and Surface Reaction Products during Si Etching in Inductively Coupled Cl$_{2}$ Plasmas

  ORAL

  Nov. 17, 2011, 2:00 PM – Nov. 17, 2011, 2:15 PM

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Molecular Dynamics Analysis of Ion Incident Energy and Angle Dependences of Si etching with Cl, Br, and HBr beams

  ORAL

  Nov. 17, 2011, 2:15 PM – Nov. 17, 2011, 2:30 PM

  Authors

  • Nobuya Nakazaki

    Kyoto University

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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