Plasma-surface Interactions
ORAL · PR3
Presentations
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Pore Sealing vs. Surface Densification in Inhibition of O$_{2}$ Plasma Damage in Organosilicates
ORAL
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Authors
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Jeffry Kelber
Dept. of Chemistry, University of North Texas, Denton, TX 76203
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Swayambhu Behera
Dept. of Chemistry, University of North Texas, Denton, TX 76203
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Simulation of the dynamics of a helium discharge in a thin dielectric tube at atmospheric pressure
ORAL
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Authors
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Jaroslav Jansky
ECP, lab EM2C, Chatenay-Malabry, France
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Francois Pechereau
ECP, lab EM2C, Chatenay-Malabry, France
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Anne Bourdon
ECP, lab EM2C, Chatenay-Malabry, France
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3D feature profile simulation based on realistic surface kinetic modeling of fluorocarbon plasma etch process
ORAL
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Authors
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Won-Seok Chang
NFRI
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Deuk-Chul Kwon
NFRI, National Fusion Research Institute
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Dong-Hun Yu
Kyung-won Tech
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Deog-Gyun Cho
Chonbuk National University
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Yeong-Geun Yook
Chonbuk National University
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Jin-Tae Kim
Chonbuk National University
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Jung-Sik Yoon
NFRI, National Fusion Research Institute
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Yeon-Ho Im
Chonbuk National University
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Optical Emission Spectroscopy Characterization of Atmospheric Pressure Plasma Removal of High Density Polyethylene
ORAL
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Authors
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Anthony McWilliams
North Carolina State University
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Steven Shannon
North Carolina State University
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Stephen Hudak
North Carolina State University
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Jerry Cuomo
North Carolina State University
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Surface Modification of PAN-based Carbon Fiber Using Single and Dual High Frequency RF-PECVD
ORAL
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Authors
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Demiral Akbar
Karatekin University of Cankiri, Dep. of Physics, 18100, Cankiri, Turkey
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Ummugul E. Gungor
Middle East Technical University, Dep. Of Physics, 06800, Ankara, Turkey
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Sinan Bilikmen
Middle East Technical University, Dep. Of Physics, 06800, Ankara, Turkey
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