Poster Session II: Plasma Appl. II; Charged Particle Collisions II; Plasma Sources II; Plasma Data Exchange Project; Plasma Diag. Tech. II; Plasma Modeling/Simulations II; Basic Plasma Phenomena II

Presentations

• PLASMA APPLICATIONS II

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• ABSTRACT WITHDRAWN

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• Air Plasma Source for Biomedical Applications

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Influence of Atmospheric Pressure Torch Plasma Irradiation on Plant Growth

  POSTER

  Authors

  • Yusuke Akiyoshi

    Saga University

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Particle-in-Cell simulations of filamentary structures formation in DBD-tissue interaction

  POSTER

  Authors

  • Alexandre Likhanskii

    Tech-X Corporation

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Modelling Positron Transport in Biological Media -- Towards a Positron Dosimetry

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Removal of Chronic Intravascular Blood Clots using Liquid Plasma

  ORAL

  Authors

  • Jae-Chul Jung

    Colorado State University

  • Myeong Yeol Choi

    Colorado State University

  • Il Gyo Koo

    Colorado State University

  • Zengqi Yu

    Colorado State University

  • George J. Collins

    Colorado State University

  View abstract →

• Disinfection of Staphylococcus Aureus by pulsed non-thermal atmospheric plasma jet

  ORAL

  Authors

  • Shahriar Mirpour

    Plasma Physics Research Center, Science Research Branches, Islamic Azad University, Tehran, Iran

  • Mahmood Ghoranneviss

    Plasma Physics Research Center, Science Research Branches, Islamic Azad University, Tehran, Iran

  • Farhad Shahgoli

    Plasma Physics Research Center, Science Research Branches, Islamic Azad University, Tehran, Iran

  View abstract →

• State of Upright Metal-Coated Carbon Nanotwists Treated by Dielectric Barrier Discharge

  POSTER

  Authors

  • Yuki Sugioka

    Toyohashi University of Technology

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Nanoparticle network growth in arc generated fireballs of silicon powder

  POSTER

  Authors

  • Tsuyohito Ito

    Osaka University

  • Mark A. Cappelli

    Stanford University Plasma Physics Laboratory, Stanford University

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• A plasma-approach for catalyst-free carbon nanotubes growth on arbitrary mechanically-written Si features

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  • Shailesh Kumar

    CSIRO CMSE

  • Igor Levchenko

    CSIRO CMSE

  • Kostya (Ken) Ostrikov

    CSIRO CMSE

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• Quantum chemical investigation for Chemical dry etching by flowing NF$_{3 }$into H$_{2}$ down flow plasma

  POSTER

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  • Koukou Suu

    ULVAC Inc.

  • Toshio Hayashi

    Nagoya University

  • Kenji Ishikawa

    Nagoya University

  • Makoto Sekine

    Nagoya University

  • Masaru Hori

    Nagoya University

  • Akihiro Kono

    Nagoya University

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• Etching rate and surface roughness of niobium samples and plasma properties of Ar/Cl$_{2}$ discharge in a SRF cavity.

  POSTER

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  • Janardan Upadhyay

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529, Old Dominion University, Department of Physics, Norfolk, VA 23529

  • Svetozar Popovic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529, Old Dominion University, Department of Physics, Norfolk, VA 23529

  • Leposava Vuskovic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529, Old Dominion University, Department of Physics, Norfolk, VA 23529

  • Anne-Marie Valente

    Thomas Jefferson National Accelerator Facility, Newport News, VA 23606

  • Larry Phillips

    Thomas Jefferson National Accelerator Facility, Newport News, VA 23606

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• Suppression of film deposition in a plasma CVD system using gas flow

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  Authors

  • Hirotaka Toyoda

    Nagoya University, Department of Electrical Engineering and Computer Science

  • Kazuki Keyamura

    Department of Electrical Engineering and Computer Science

  • Tatsuo Ishijima

    Nagoya University, Plasma Nanotechnology Research Center, Nagoya University

  View abstract →

• Application of Toroidal Magnetron Sputtering system: characteristics of ZnO:Al thin films

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Yonghyun Kim

    National Fusion Research Institute

  • Young-Woo Kim

    National Fusion Research Institute

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Oxygen transport through polyethylene terephthalate (PET) coated with plasma-polymerized acetylene at atmospheric pressure

  ORAL

  Authors

  • Erik Wemlinger

    Washington State University

  • Patrick Pedrow

    Washington State University

  • Manuel Garcia-P\'erez

    Washington State University

  • Shyam Sablani

    Washington State University

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• Experimental and Computational Investigation of a Plasma Ion Accelerator with Multiple Magnetic Field Cusps

  POSTER

  Authors

  • Christopher Young

    Stanford University Plasma Physics Laboratory

  • Mark A. Cappelli

    Stanford University Plasma Physics Laboratory, Stanford University

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• CHARGED PARTICLE COLLISIONS II

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• Electronic density fluctuation associated to coherent plasmon excitations

  POSTER

  Authors

  • Juana Gervasoni

    CNEA-CONICET

  • Silvina Segui

    CONICET

  • Nestor Arista

    CNEA

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• Laser Electron-gamma-Nuclear Spectroscopy of Diatomic and Multiatomic Molecules

  POSTER

  Authors

  • Alexander Glushkov

    Odessa University and Troitsk ISAN, Russian Acad. Sci., Odessa University, Odessa University and Troitsk ISAN Russian Acad.Sci.

  • Olga Khetselius

    Odessa University

  • Andrey Svinarenko

    Odessa University

  View abstract →

• Small Rare Gas Clusters in a Kinematically Complete (e,2e)-Experiment

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• A kinematically complete experiment for positron impact ionization of helium at the positron beam facility NEPOMUC

  POSTER

  Authors

  • Alexander Dorn

    Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Energy Approach to Atoms, Ions and Nuclei in a Super Strong Laser Field

  POSTER

  Authors

  • Alexander Glushkov

    Odessa University and Troitsk ISAN, Russian Acad. Sci., Odessa University, Odessa University and Troitsk ISAN Russian Acad.Sci.

  View abstract →

• Evaluation of Electron Ionization Cross Sections for Carbon Fullerenes

  ORAL

  Authors

  • Satyendra Pal

    MMH College, Ghaziabad

  • Neeraj Kumar

    MMH College, Ghaziabad

  View abstract →

• Vibrational Excitation of Furan by Electron Impact

  POSTER

  Authors

  • Gabriela Serna

    California State University Fullerton Physics, Fullerton, CA 92834, California State University Fullerton, Physics Department, CA, 92834

  • Rehab Al-Buraidi

    California State University Fullerton Physics, Fullerton, CA 92834

  • Leigh R. Hargreaves

    California State University Fullerton Physics, Fullerton, CA 92834, California State University Fullerton, Physics Department, CA, 92834, California State University Physics, Fullerton, CA 92834

  • Murtadha A. Khakoo

    California State University Fullerton Physics, Fullerton, CA 92834, California State University - Fullerton, California State University Fullerton, Physics Department, CA, 92834, Cal State University Physics, Fullerton, CA 92834, California State University Physics, Fullerton, CA 92834, Department of Physics, California State University, Fulerton, CA 92834

  View abstract →

• Calculation of electron scattering from the ground state of ytterbium

  POSTER

  Authors

  • Dmitry Fursa

    Curtin University

  • Christopher Bostock

    Curtin University

  • Igor Bray

    Curtin University

  View abstract →

• Electron Impact Induced VUV Emission from Argon

  POSTER

  Authors

  • J.A. Young

    The Aerospace Corporation

  • Charles P. Malone

    Jet Propulsion Lab, Jet Propulsion Laboratory

  • P.V. Johnson

    Jet Propulsion Lab

  View abstract →

• Electron Impact Excitation Cross Sections for N-like ions

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Rotationally elastic total cross sections for NH$_{3}$ on electron impact over a wide energy range

  ORAL

  Authors

  • Minaxi Vinodkumar

    V.P. \& R.P. T.P. Science College, V.P. \& R.P.T.P. Science College

  • Chetan Limbachiya

    P.S. Science College

  • Bobby Antony

    Indian School of Mines Dhanbad 826004 (INDIA)

  View abstract →

• Calculations of electron impact excitation in planetary atmospheres

  POSTER

  Authors

  • Michael Brunger

    ARC Centre for Antimatter-Matter Studies, Flinders University, Australia, Flinders University

  • Laurence Campbell

    ARC Centre for Antimatter-Matter Studies, Flinders University, Australia

  • Sudhaghar Jaya

    ARC Centre for Antimatter-Matter Studies, Flinders University, Australia

  View abstract →

• Oscillations in the autoionization energy distribution of He2+ + H2 double capture collisions

  POSTER

  Authors

  • R.O. Barrachina

    Centro Atomico Bariloche, 8400 Bariloche, Rio Negro, Argentina, Centro At\'omico Bariloche, Instituto Balseiro, CONICET Argentina, Centro Atomico Bariloche and Instituto Balseiro (Comision Nacional de Energia Atomica), 8400 Bariloche, Rio Negro, Argentina

  • B.S. Frankland

    Centre de Recherche sur les Ions, les Materiaux et la Photonique, 6 Bd Marechal Juin, 14050 Caen cedex 04, France

  • J.-Y. Chesnel

    Centre de Recherche sur les Ions, les Materiaux et la Photonique, 6 Bd Marechal Juin, 14050 Caen cedex 04, France

  • F. Fremont

    Centre de Recherche sur les Ions, les Materiaux et la Photonique, 6 Bd Marechal Juin, 14050 Caen cedex 04, France

  View abstract →

• Effect of projectile coherence on multiple differential cross sections for 75 keV proton impact on H$_{2}$

  POSTER

  Authors

  • Sachin Sharma

    Missouri S\&T, Dept. of Physics, Rolla, MO, Department of Physics, Missouri University of Science and Technology, Rolla, MO

  • Kisra Egodapitiya

    Missouri S\&T, Dept. of Physics, Rolla, MO, Department of Physics, Missouri University of Science and Technology, Rolla, MO

  • Don Madison

    Missouri S\&T, Dept. of Physics, Rolla, MO, Missouri S and T, Missouri University of Science and Technology

  • Michael Schulz

    Missouri S\&T, Dept. of Physics, Rolla, MO, Department of Physics and LAMOR, Missouri University of Science and Technology, Rolla, MO 65409, Department of Physics, Missouri University of Science and Technology, Rolla, MO, Missouri University of Science \& Technology

  • Ahmad Hasan

    UAE University, Dept. of Physics, Abu Dhabi, Department of Physics, UAE University, Abu Dhabi, United Arab Emirates

  • Aaron Laforge

    Max-Planck-Institut f\"ur Kernphysik, Heidelberg, Germany, Department of Physics, Missouri University of Science and Technology, Rolla, MO

  • R. Moshammer

    Max-Planck-Institut f\"ur Kernphysik, Heidelberg, Germany

  View abstract →

• PLASMA SOURCES II

  View abstract →

• Current-voltage-time characteristics of the reactive Ar/N$_2$ high power impulse magnetron sputtering discharge

  POSTER

  Authors

  • Jon Tomas Gudmundsson

    Shanghai Jiao Tong University

  • Fridrik Magnus

    University of Iceland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Sveinn Olafsson

    University of Iceland

  View abstract →

• A parametric study of DC-RF Penning-type plasma discharge

  POSTER

  Authors

  • Yevgeny Raitses

    Princeton Plasma Physics Laboratory, Princeton, NJ, Princeton Plasma Physics Laboratory

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Optimization and Characterization of a Helicon Ion Source on an Inertial Electrostatic Confinement Device for Helium-3 Fusion

  POSTER

  Authors

  • Gabriel Becerra

    University of Wisconsin-Madison

  • Gerald Kulcinski

    University of Wisconsin-Madison

  • John Santarius

    University of Wisconsin-Madison

  View abstract →

• Simulating Electron Cyclotron Resonance Heating in Kinetic and Dielectric Plasma Models with VORPAL

  POSTER

  Authors

  • Christine Roark

    Tech-X Corporation

  • David Smithe

    Tech-X Corporation

  • Peter Stoltz

    Tech-X Corporation

  View abstract →

• Hybrid Fluid-Analytical Simulations of E to H Instability in Electronegative Discharges

  POSTER

  Authors

  • E. Kawamura

    University of California, Berkeley

  • A.J. Lichtenberg

    University of California, Berkeley

  • Michael A. Lieberman

    University of California, Berkeley, University of California at Berkeley

  • David Graves

    University of California, Berkeley, University of California at Berkeley

  View abstract →

• ABSTRACT WITHDRAWN

  View abstract →

• Measurement of power transfer efficiency and ion density in various radio-frequency inductively coupled plasma

  POSTER

  Authors

  • Jae-Won Lee

    Department of Electrical Engineering, Hanyang University

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• ABSTRACT WITHDRAWN

  View abstract →

• A simple analysis of inductively coupled discharge using transformer circuit model

  POSTER

  Authors

  • Yound-Do Kim

    Hanyang University

  • Hyo-Chang Lee

    Hanyang University, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• Measurement of the electron energy distribution in magnetized solenoidal inductively coupled plasma

  POSTER

  Authors

  • Jin-Yong Kim

    Department of Electrical Engineering, Hanyang University, Republic of Korea

  • Hyo-Chang Lee

    Hanyang University, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• Electrical characteristics and mode transition of power dissipation in an asymmetric capacitively coupled plasma

  POSTER

  Authors

  • Soo-Jin Lee

    Department of Information Display Engineering, Hanyang University, Republic of Korea

  • Hyo-Chang Lee

    Hanyang University, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• Experiment, simulation, and model investigations on capacitive oxygen rf discharges driven by two consecutive frequencies

  POSTER

  Authors

  • Edmund Schuengel

    Ruhr-University Bochum

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Secondary electrons in dual-frequency capacitive radio frequency discharges

  POSTER

  Authors

  • Julian Schulze

    Ruhr-University Bochum

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• 2-dimensional simulations of electrically asymmetric capacitively coupled RF-discharges

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Multiple frequency capacitive plasmas as a tool to optimize PVD processes

  POSTER

  Authors

  • Stefan Bienholz

    Ruhr University Bochum / AEPT

  • Egmont Semmler

    Ruhr University Bochum, Ruhr University Bochum / AEPT

  • Peter Awakowicz

    Ruhr-University, Ruhr University Bochum / AEPT

  View abstract →

• Kinetic Effects in Low Pressure Capacitively Coupled Plasmas

  POSTER

  Authors

  • Alexandre Likhanskii

    Tech-X Corporation

  • Christine Roark

    Tech-X Corporation

  • Peter Stoltz

    Tech-X Corporation

  View abstract →

• Calculation of 2D charged particles density distributions and current-voltage characteristics of RF CCP discharge by means of Galerkin method

  ORAL

  Authors

  • Sergey Dvinin

    Lomonosov Moscow State university, Faculty of Physics

  • Won-Taek Park

    SEMES Co, Ltd, Republic of Korea

  • Aleksey Kalinin

    SEMES Co, Ltd, Republic of Korea

  • Andriy Kashaba

    SEMES Co, Ltd, Republic of Korea

  • Nikolay Nikishin

    SEMES Co, Ltd, Republic of Korea

  View abstract →

• Plasma formation in water vapour layers in high conductivity liquids

  POSTER

  Authors

  • C.P. Kelsey

    Queens University of Belfast

  • L. Schaper

    Queens University of Belfast

  • K.R. Stalder

    Stalder Technologies and Research

  • William Graham

    Queens University of Belfast, Queens University Belfast, Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

  View abstract →

• Some chemical properties of plasmas created in liquid solutions

  POSTER

  Authors

  • Lucie Nemcova

    Brno University of Technology

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Time-resolved OES measurement of microwave plasma produced inside controlled bubbles under water

  POSTER

  Authors

  • Tatsuo Ishijima

    Nagoya University, Plasma Nanotechnology Research Center, Nagoya University

  • Haruka Suzuki

    Nagoya University

  • Hirotaka Toyoda

    Nagoya University, Department of Electrical Engineering and Computer Science

  View abstract →

• Atmospheric dc glow discharge using liquid anode for production of nano-particle

  POSTER

  Authors

  • Naoki Shirai

    Tokyo Metropolitan University

  • Satoshi Uchida

    Tokyo Metropolitan University

  • Fumiyoshi Tochikubo

    Tokyo Metropolitan University

  View abstract →

• Experimental and modeling investigation of DC Oxygen Discharge having Water Electrode

  POSTER

  Authors

  • Kei Ikeda

    Tokyo Institute of Technology

  • Mizuki Ando

    Tokyo Institute of Technology

  • Nozomi Takeuchi

    Tokyo Institute of Technology

  • Koichi Yasuoka

    Tokyo Institute of Technology

  View abstract →

• Spatiotemporal discharge characteristics in saline plasma for the biomedical applications

  ORAL

  Authors

  • Jae-Chul Jung

    Colorado State University

  • Myeong Yeol Choi

    Colorado State University

  • Zengqi Yu

    Colorado State University

  • Il Gyo Koo

    Colorado State University

  • George J. Collins

    Colorado State University

  View abstract →

• Influence of charge accumulation on a dielectric capillary atmospheric pressure plasma jet

  POSTER

  Authors

  • Brian Sands

    UES, Inc.

  • Shih Kang Huang

    Wright State University

  • Jared Speltz

    Wright State University

  • Matthew Niekamp

    Wright State University

  • Biswa Ganguly

    Air Force Research Laboratory

  View abstract →

• Identifying single electron avalanches in streamer discharges

  POSTER

  Authors

  • Gideon Wormeester

    Centrum Wiskunde and Informatica, PO Box 94097, 1090 GB Amsterdam, The Netherlands, CWI Amsterdam, NL, Centrum Wiskunde and Informatica (CWI), PO Box 94097, 1090 GB Amsterdam, The Netherlands

  • Sander Nijdam

    Eindhoven University of Technology, Eindhoven Univ. Techn., NL

  • Ute Ebert

    CWI A'dam and Eindhoven UT, CWI Amsterdam, Eindhoven UT

  View abstract →

• Effects of background- and photo-ionization on positive streamers

  POSTER

  Authors

  • Ute Ebert

    Centrum Wiskunde \& Informatica and Eindhoven University of Technology

  • Sander Nijdam

    Eindhoven University of Technology, Eindhoven Univ. Techn., NL

  • Gideon Wormeester

    Centrum Wiskunde \& Informatica

  • E.M. van Veldhuizen

    Eindhoven University of Technology

  View abstract →

• Design and characterization of a novel coaxial VHF plasma source for air plasma formation

  POSTER

  Authors

  • Brandon Byrns

    North Carolina State University

  • Daniel Wooten

    North Carolina State University

  • Steven Shannon

    North Carolina State University

  View abstract →

• Phase Contrast Imaging of Induced Airflow Topologies Produced by Dielectric Barrier Plasma Actuators

  POSTER

  Authors

  • Sirous Nourgostar

    Nuclear Eng. and Eng. Physics, University of Wisconsin, Madison/WI, United States

  • Noah Hershkowitz

    University of Wisconsin - Madison, Nuclear Eng. and Eng. Physics, University of Wisconsin, Madison/WI, United States, University of Wisconsin-Madison

  View abstract →

• The role of molecular air species in kHz driven atmospheric pressure plasma jets

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• PLASMA DATA EXCHANGE PROJECT

  View abstract →

• Coherent set of electron cross sections for argon

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Electron scattering from krypton: High-resolution electron scattering experiments and B-spline R-matrix calculations

  POSTER

  Authors

  • Oleg Zatsarinny

  • Klaus Bartschat

    Drake University

  • Michael Allan

    University of Fribourg

  View abstract →

• Compilation of cross sections for kinetic models of low pressure hydrogen discharges

  POSTER

  Authors

  • A.V. Phelps

    JILA, University of Colorado and NIST

  View abstract →

• Implement of Data Collection and Evaluation System for Plasma Chemistry

  POSTER

  Authors

  • Jun-Hyoung Park

    National Fusion Research Institute

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Comparisons of sets of electron-neutral scattering cross sections and calculated swarm parameters in He and Ne

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  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Comparisons of sets of electron-neutral scattering cross sections and calculated swarm parameters in Ar

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  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• Comparisons of sets of electron-neutral scattering cross sections and calculated swarm parameters in Kr and Xe

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  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• PLASMA DIAGNOSTICS TECHNIQUES II

  View abstract →

• Frequency probe measurements of electron density, plasma potential, and electron energy distribution in processing plasmas

  POSTER

  Authors

  • Dave Boris

    Naval Research Laboratory

  • Richard Fernsler

    Naval Research Laboratory

  • Scott Walton

    Naval Research Laboratory

  View abstract →

• Experimental investigation of argon metastable density and electron temperature in low-pressure plasma by line-ratio OES technique

  POSTER

  Authors

  • Young-Kwang Lee

    Hanyang University, Korea

  • Yu-Sin Kim

    Department of Electrical Engineering, Hanyang University, Hanyang University, Korea

  • Jae-Won Lee

    Hanyang University, Korea

  • Hye-Ju Hwang

    Hanyang University, Korea

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• Double probe using an ac bias signal for plasma parameters measurement

  POSTER

  Authors

  • Se-Jin Oh

    Hanyang University, Department of Electrical Engineering, Hanyang University

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• A study on floating harmonic method in non-Maxwellian plasmas

  POSTER

  Authors

  • Kyoung Yoo

    Department of Nanoscale Semiconductor Engineering, Hanyang University

  • Jin-Young Bang

    Department of Electrical Engineering, Hanyang University

  • Yu-Sin Kim

    Department of Electrical Engineering, Hanyang University, Hanyang University, Korea

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• Measurement of the plasma density and electron temperature uniformities in inductively coupled plasmas using 2D real time measurement method

  POSTER

  Authors

  • Young-Cheol Kim

    Hanyang University

  • Yu-Sin Kim

    Hanyang University

  • Se-Jin Oh

    Hanyang University, Department of Electrical Engineering, Hanyang University

  • Hyo-Chang Lee

    Hanyang University, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  • ChinWook Chung

    Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, Korea, Department of Electrical Engineering, Hanyang University, Republic of Korea, Electrical Engineering, Hanyang University, Korea

  View abstract →

• Catalytic probe measurements in a large scale CCP reactor

  POSTER

  Authors

  • Sasa Lazovic

    Institute of Physics, University of Belgrade, Serbia

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Uros Cvelbar

    Jozef Stefan Institute, Ljubljana, Slovenia

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Time resolved ICCD images of an atmospheric pressure plasma jet

  POSTER

  Authors

  • Nevena Puac

    Institute of Physics, University of Belgrade, Serbia

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Determination of Electron and Ion Energy Distribution Functions in a Plasma Ion Assisted Deposition (PIAD) Process

  POSTER

  Authors

  • J. Harhausen

    Leibniz Institute for Plasma Science and Technology

  • R. Foest

    Leibniz Institute for Plasma Science and Technology

  • A. Ohl

    Leibniz Institute for Plasma Science and Technology

  View abstract →

• Tomographic Reconstruction of Local Parameters of a Plasmoid in the Afterglow of a Supersonic Flow Microwave Discharge

  POSTER

  Authors

  • Ana Samolov

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529

  • Milka Nikolic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529, Old Dominion University, Department of Physics, Norfolk, VA 23529

  • Alexander Godunov

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529

  • Svetozar Popovic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529, Old Dominion University, Department of Physics, Norfolk, VA 23529

  • Leposava Vuskovic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529

  • Filip Cuckov

    Old Dominion University, Department of Electrical and Computer Engineering, Norfolk, VA 23529

  View abstract →

• Electron Density Measurements in Nitrogen-Containing Pulse-Repetitive Microwave Discharge

  POSTER

  Authors

  • Milka Nikolic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529, Old Dominion University, Department of Physics, Norfolk, VA 23529

  • Ana Samolov

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529

  • Alexander Godunov

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529

  • Svetozar Popovic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529, Old Dominion University, Department of Physics, Norfolk, VA 23529

  • Leposava Vuskovic

    Old Dominion University, Department of Physics, Center for Accelerator Science, Norfolk, VA 23529

  View abstract →

• Quantitative evaluation of the effect of multiphoton ionization in laser Thomson scattering diagnostics of low-temperature plasmas

  POSTER

  Authors

  • Akihiro Kono

    Nagoya University

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• DC Self Bias Trends in Dual Frequency PECVD Deposition Systems

  ORAL

  Authors

  • D.L. Keil

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• PLASMA MODELING AND SIMULATION II

  View abstract →

• Simulations of positive streamers with highly accurate transport data

  POSTER

  Authors

  • Sasa Dujko

    Centrum Wiskunde and Informatica, PO Box 94097, 1090 GB Amsterdam, The Netherlands, Centrum Wiskunde and Informatica (CWI), PO Box 94097, 1090 GB Amsterdam, The Netherlands

  • Gideon Wormeester

    Centrum Wiskunde and Informatica, PO Box 94097, 1090 GB Amsterdam, The Netherlands, CWI Amsterdam, NL, Centrum Wiskunde and Informatica (CWI), PO Box 94097, 1090 GB Amsterdam, The Netherlands

  • Ute Ebert

    Eindhoven University of Technology, Centrum Wiskunde and Informatica, PO Box 94097, 1090 GB Amsterdam, The Netherlands, Centrum Wiskunde and Informatica (CWI), PO Box 94097, 1090 GB Amsterdam, The Netherlands

  View abstract →

• Discharge dynamics in a helium capacitively coupled plasma with variable oxygen admixture

  POSTER

  Authors

  • Arthur Greb

  • Kari niemi

    Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Belfast BT7 1NN, Northern Ireland, UK, Queens University Belfast, Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

  • Deborah O'Connell

    York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, University of York, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

  • Timo Gans

    York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DQ, UK, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, University of York, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

  View abstract →

• A spectral Poisson solver for kinetic plasma simulation

  POSTER

  Authors

  • Daniel Szeremley

    Institute for Theoretical Electrical Engineering, Ruhr University Bochum

  • Jens Oberrath

    Ruhr-Universit\"at Bochum, Theoretical Electrical Engineering, Ruhr University Bochum

  • Ralf Peter Brinkmann

    RUB, Ruhr-University Bochum, Ruhr-Universit\"at Bochum, Ruhr University

  View abstract →

• Model of fusion kinetics for electrostatic inertial confinement discharges in D$_2$

  POSTER

  Authors

  • A.V. Phelps

    JILA, University of Colorado and NIST

  View abstract →

• Modeling and Simulation of the sheath in radio-frequency driven plasmas at atmospheric pressure

  POSTER

  Authors

  • Torben Hemke

    Ruhr-University Bochum

  • Thomas Mussenbrock

    Ruhr-University Bochum

  • Ralf Peter Brinkmann

    RUB, Ruhr-University Bochum, Ruhr-Universit\"at Bochum, Ruhr University

  View abstract →

• Kinetic simulation of radio-frequency driven plasmas in He/O$_2$ mixtures at atmospheric pressure

  POSTER

  Authors

  • Denis Eremin

    Ruhr-University Bochum

  • Torben Hemke

    Ruhr-University Bochum

  • Ralf Peter Brinkmann

    RUB, Ruhr-University Bochum, Ruhr-Universit\"at Bochum, Ruhr University

  • Thomas Mussenbrock

    Ruhr-University Bochum

  View abstract →

• Chemical kinetics study of a nanosecond pulsed He-O2 plasma Jet

  POSTER

  Authors

  • Shengguo Xia

    University of Southern California, Los Angeles, CA, USA, 90089

  • Chunqi Jiang

    University of Southern California, Los Angeles, CA, USA, 90089, University of Southern California

  View abstract →

• Use of the shell model for plasma physics simulation

  POSTER

  Authors

  • Elisabetta Boella

    GoLP/Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Lisbon, Portugal and Dipartimento di Energetica, Politecnico di Torino, Italy

  • Gianni Coppa

    Dipartimento di Energetica, Politecnico di Torino, Turin, Italy

  • Antonio D'Angola

    Dipartimento di Ingegneria e Fisica dell'Ambiente, Universit\`a della Basilicata, Potenza, Italy

  • Frederico Fi\'uza

    GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  View abstract →

• Simulations of the Plasma Structure of a Radial Line Slotted Antenna Plasma Source

  POSTER

  Authors

  • Jun Yoshikawa

    Tokyo Electron Technology Development Institute

  View abstract →

• Multi-dimensional modelling of atmospheric pressure discharges with complex chemistry

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • M.M. Turner

    Dublin City University, Ireland, NCPST, Dublin City University, Ireland

  View abstract →

• Modeling of self-consistent artificial radiowave ionospheric turbulence pumping and damping

  ORAL

  Authors

  • Andrey Kochetov

    Institute of Applied Physics of RAS

  View abstract →

• BASIC PLASMA PHYSICS PHENOMENA II

  View abstract →

• Spatiotemporal measurement of translational and vibrational temperatures after pulsed corona discharge using laser spectroscopy

  POSTER

  Authors

  • Ryo Ono

    The University of Tokyo

  • Yoshiyuki Teramoto

    The University of Tokyo

  • Nakagawa Yusuke

    The University of Tokyo

  • Atsushi Komuro

    The University of Tokyo

  • Tetsuji Oda

    The University of Tokyo

  View abstract →

• Mass analysis of trifluoro-iodo-methane in a Surface Barrier Discharge

  POSTER

  Authors

  • J.A. Rees

    Hiden Analytical

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • J.A. Rees

    Hiden Analytical

  View abstract →

• Mechanisms of Ion-Molecule Reactions in Cyclohexane

  POSTER

  Authors

  • Charles Jiao

    UES

  • Steven Adams

    Air Force Research Laboratory

  View abstract →

• Ion Source for Study of the Interaction of High Ion Fluxes with Fusion Relevant Plasma Facing Materials

  POSTER

  Authors

  • Aleksander Bizyukov

    V.N. Karazin Kharkiv National University

  • Ivan Bizyukov

    V.N. Karazin Kharkiv National University

  • Kostyantyn Sereda

    V.N. Karazin Kharkiv National University

  • Oleksii Girka

    V.N. Karazin Kharkiv National University

  View abstract →

• Photoluminescence Observation of GaN Thin Films Treated by Inductively-Coupled Plasmas

  POSTER

  Authors

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Keiji Nakamura

    Chubu Univ.

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

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• MHD Waves in a Flowing Partially Ionized Prominence Plasma with Oblique Magnetic Field

  POSTER

  Authors

  • Nagendra Kumar

    M.M.H. College, Ghaziabad

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• Study of evaporating droplet temperature in low pressure plasma

  POSTER

  Authors

  • Daisuke Ogawa

    University of Texas at Dallas

  • Matthew Goeckner

    University of Texas at Dallas

  • Lawrence Overzet

    University of Texas at Dallas

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