Poster Session I (7:00-9:30PM)

Presentations

• ATOMIC AND MOLECULAR PROCESSES

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• Comparison of spherical and spheroidal expansions for energies and oscillator strengths of H\(_2^+\)

  POSTER

  Authors

  • Jeremy Savage

    Curtin University

  • Dmitry Fursa

    Curtin University

  • Mark Zammit

    Curtin University

  • Igor Bray

    Curtin University

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• Electron Scattering from Pyrazine compared with Pyrimidine and Benzene

  POSTER

  Authors

  • P.D. Palihawadana

    The Australian National University, Canberra, Australia

  • J.P. Sullivan

    The Australian National University, Canberra, Australia

  • S.J. Buckman

    The Australian National University, Canberra, Australia

  • Michael Brunger

    CAMS, Flinders University, Adelaide, Australia, Flinders University, Adelaide, Australia, Flinders University

  • Carl Winstead

    California Institute of Technology, California, Caltech, CA, USA, California Institute of Technology, Pasadena, CA, USA

  • Vincent McKoy

    Caltech, CA, USA, California Institute of Technology, Pasadena, CA, USA

  • G. Garcia

    CSIC, Madrid, Spain

  • F. Blanco

    Universidad Complutense de Madrid, Madrid, Spain

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• Comparison of ion-molecule reactions in cyclohexane, methylcyclohexane and ethylcyclohexane

  POSTER

  Authors

  • Charles Jiao

    UES

  • Steven Adams

    Air Force Research Laboratory

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• Electron Impact Excitation and Ionization of Neon

  POSTER

  Authors

  • Oleg Zatsarinny

    Drake University

  • Klaus Bartschat

    Drake University

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• Relativistic convergent close-coupling calculation of the spin polarization of electrons scattered from indium

  POSTER

  Authors

  • Christopher Bostock

    Curtin University

  • Dmitry Fursa

    Curtin University

  • Igor Bray

    Curtin University

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• Electronic excitation of methanol by low energy electrons

  POSTER

  Authors

  • Joshua Tanner

    California State University Fullerton, California State University, Fullerton, CA, USA

  • Leigh Hargreaves

    California State University Fullerton

  • Murtadha Khakoo

    California State University Fullerton

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• ABSTRACT WITHDRAWN

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• Generalized Hyperspherical Sturmian functions applied to three-body ionization problems

  POSTER

  Authors

  • Lorenzo Ugo Ancarani

    Universite de Lorraine, Metz, France

  • Dario M. Mitnik

    IAFE and Universidad de Buenos Aires, Argentina

  • Gustavo Gasaneo

    Universidad Nacional del Sur, Bahia Blanca, Argentina

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• Low energy studies (e,2e) studies from Ammonia (NH$_{3})$

  POSTER

  Authors

  • Hari Chaluvadi

    Missouri University of Science and Technology

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• High Energy Proton-Impact Single Electron Capture from Helium

  POSTER

  Authors

  • K. Morrison

    Henderson State University

  • Allison Harris

    Henderson State University

  View abstract →

• Experimental measurement of plasma parameters and electron energy distribution in ferrite-core side type Ar/He inductively coupled plasma

  POSTER

  Authors

  • Duksun Han

    Hanyang University

  • Jin-Young Bang

    Department of Electrical Engineering, Hanyang University, Hanyang University

  • Hyo-Chang Lee

    Department of Electrical Engineering, Hanyang University, Hanyang University

  • Chin-Wook Chung

    Department of Electrical Engineering, Hanyang University, Hanyang University

  View abstract →

• Spatial plasma potentials and electron energy distributions in inductively and capacitively coupled plasmas under a weakly collisional and nonlocal electron kinetic regime

  POSTER

  Authors

  • Hyo-Chang Lee

    Department of Electrical Engineering, Hanyang University, Hanyang University

  • Chin-Wook Chung

    Department of Electrical Engineering, Hanyang University, Hanyang University

  View abstract →

• Momentum transfer cross sections for the heavy noble gases

  POSTER

  Authors

  • Allan Stauffer

    York University, Toronto, Canada, York University, Toronto ON Canada

  • R.P. McEachran

    ANU, Canberra, Australia

  View abstract →

• Positron scattering off the H$_{2}^{+}$ and H$_{2}$ molecules using the convergent close-coupling method

  POSTER

  Authors

  • Mark Zammit

    Curtin University

  • Jeremy Savage

    Curtin University

  • Dmitry Fursa

    Curtin University

  • Igor Bray

    Curtin University

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• Positron Reaction Microscope

  POSTER

  Authors

  • Dennis Mueller

    University of North Texas

  • Simon Armitage

    University of North Texas

  • Corbin Vermet

    University of North Texas

  • Chistopher Lee

    University of North Texas

  • Alexander Dorn

    Max-Planck-Institut f\"ur Kernphysik Heidelberg

  • Stephen Buckman

    The Australian National University, Centre for Antimatter-Matter Studies, The Australian National University

  • James Sullivan

    The Australian National University

  View abstract →

• Positron scattering from helium

  POSTER

  Authors

  • Roisin Boadle

    CAMS, Australian National University, Canberra

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Low Energy Positron Scattering from Molecular Hydrogen

  POSTER

  Authors

  • Emma Anderson

    CAMS, Australian National University, Canberra

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Positron scattering from tetrahydrofuran

  POSTER

  Authors

  • Michael Brunger

    CAMS, Flinders University, Adelaide, Australia, Flinders University, Adelaide, Australia, Flinders University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Low Energy Elastic Electron Scattering from Acetaldehyde

  POSTER

  Authors

  • Murtadha A. Khakoo

    California State University Fullerton, California State University, Fullerton, CA, USA

  • George Balch

    California State University Fullerton

  • Christopher Navarro

    California State University Fullerton

  • Leigh R. Hargreaves

    California State University Fullerton

  • Murtadha A. Khakoo

    California State University Fullerton, California State University, Fullerton, CA, USA

  • Carl Winstead

    California Institute of Technology, California, Caltech, CA, USA, California Institute of Technology, Pasadena, CA, USA

  • Vincent McKoy

    California Institute of Technology, California

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• PLASMA APPLICATIONS

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• Method to reduce particles and defects on unprocessed wafers caused by clusterization and cross contamination from processed wafers

  POSTER

  Authors

  • Sanket Sant

    Lam Research Corporation

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• Plasma-liquid system with rotational gliding arc with liquid electrode

  POSTER

  Authors

  • Oleg Nedybaliuk

    Taras Shevchenko National University of Kyiv

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Amplification of femtosecond vacuum ultraviolet laser pulses at 126 nm in an optical-field-induced ionized argon plasma

  POSTER

  Authors

  • Shoichi Kubodera

    Dept. of EEE and Photon Science Center, University of Miyazaki

  • Masanori Kaku

    Dept. of EEE and Photon Science Center, University of Miyazaki

  • Masahito Katto

    CRC, University of Miyazaki

  • Kenzo Miyazaki

    IAE, Kyoto University

  View abstract →

• Modelling of microwave-driven micro-plasmas in HCPCF

  POSTER

  Authors

  • L.L. Alves

    IPFN/IST-UTL, Portugal

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• ABSTRACT WITHDRAWN

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• Interconnection resistance improvement by plasma treatment after etching the contact hole

  POSTER

  Authors

  • Nam-Gun Kim

    Samsung Electronics

  • Sung-Il Cho

    Samsung Electronics

  • Yoon-Jae Kim

    Samsung Electronics

  • Chan-Min Lee

    Samsung Electronics

  • Ji-Hee Kim

    Samsung Electronics

  • Cheol-Kyu Lee

    Samsung Electronics

  • Seok-Woo Nam

    Samsung Electronics

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• Seeking Methods to Reduce the Aspect Ratio Dependence in Deep Silicon Etch

  POSTER

  Authors

  • Robert L. Bates

    The University of Texas at Dallas

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Feature Profile Simulations and Finite Penetration Depth

  POSTER

  Authors

  • Paul Moroz

    Tokyo Electron US Holdings

  • Daniel Moroz

    Tokyo Electron US Holdings

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• Precise plasma process control based on combinatorial plasma etching

  POSTER

  Authors

  • Makoto Sekine

    Graduate School of Engineering, Nagoya University, Nagoya University, Nagoya University, Japan

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• GPU based 3D feature profile simulation for plasma etch process

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  • Deog-Gyun Cho

    Chonbuk National University

  • Dong-Hun Yu

    Kyung Won Tech.Inc

  • Yeong-Geun Yook

    Chonbuk National University

  • Won-Seok Chang

    National Fusion Research Institute

  • Poo-Reum Chun

    Chonbuk National University

  • Se-A Lee

    Chonbuk National University

  • Yeon-Ho Im

    Chonbuk National University

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• Preparation of Alq$_{3}$ thin films using a pulsed laser deposition method with cooling target by liquid nitrogen

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  • Yoshiaki Suda

    Sasebo National College of Technology

  • Tamiko Ohshima

    Sasebo National College of Technology

  • Hiroharu Kawasaki

    Sasebo National College of Technology

  • Toshinobu Shigematsu

    Sasebo National College of Technology

  • Yoshihito Yagyu

    Sasebo National College of Technology

  • Takeshi Ihara

    Sasebo National College of Technology

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• Study of thin film formation using an rf non-thermal plasma jet at atmospheric pressure

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  • Florian Sigeneger

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Jan Sch\"afer

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • R\"udiger Foest

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Detlef Loffhagen

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

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    INP Greifswald e.V., INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP, Greifswald, Germany

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• High Power Pulsed Magnetron Sputtering for Deposition of Amorphous Carbon Films

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  Authors

  • Takashi Kimura

    Nagoya Institute of Technology

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Plasma modification in a rotating reactor of vanadium oxide for electro-chromic devices

  POSTER

  Authors

  • Gamze Ongoren

    Suleyman Demirel Universitesi

  • Muhammed Sancak

    Suleyman Demirel Universitesi

  • Sorin Manolache

    University of Wisconsin-Madison, Suleyman Demirel University

  • Neslihan Nohut

    Suleyman Demirel Universitesi

  • Ali Gulec

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Aysegul Uygun

    Suleyman Demirel Universitesi

  • Lutfi Oksuz

    Suleyman Demirel University, Suleyman Demirel Universitesi

  View abstract →

• Plasma characteristics of PTFE and hexafluoropropene deposition on AISI 1050 Stainless steel for lubrication

  POSTER

  Authors

  • Erdogan Teke

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Ferhat Bozduman

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Ali Gulec

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Hatice Varol

    Suleyman Demirel University

  • Sorin Manolache

    University of Wisconsin-Madison, Suleyman Demirel University

  • Erdem Camurlu

    Akdeniz Universitesi

  • Cahit Kurbanoglu

    Suleyman Demirel University

  • Lutfi Oksuz

    Suleyman Demirel University, Suleyman Demirel Universitesi

  View abstract →

• Enhancing antibacterial properties of UHMWPE via ion implantation

  POSTER

  Authors

  • Vincenzo Nassisi

    Department of Mathematics and Physics - University of Salento

  • Domenico Delle Side

    Department of Mathematics and Physics - University of Salento

  • Luciano Velardi

    Department of Mathematics and Physics - University of Salento

  • Pietro Alifano

    Di.S.Te.B.A. - University of Salento

  • Adelfia Tal\`a

    Di.S.Te.B.A. - University of Salento

  • Salvatore Maurizio Tredici

    Di.S.Te.B.A. - University of Salento

  View abstract →

• Industrial application of the decomposition of CO$_{2}$ $\cdot$ NO$_{x}$ by large flow atmospheric microwave plasma LAMP employed in motorcar

  POSTER

  Authors

  • Anil Pandey

    Chubu University

  • Anil Pandey

    Chubu University

  • Anil Pandey

    Chubu University

  • Anil Pandey

    Chubu University

  View abstract →

• Time constants in the transition between equilibrium and nonequilibrium combustion states of premixed burner flame irradiated by pulsed microwave

  POSTER

  Authors

  • K. Sasaki

    Hokkaido University, Japan, Hokkaido University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Laser-induced breakdown stabilization of non-premixed jet diffusion flames

  POSTER

  Authors

  • Moon Soo Bak

    Stanford University

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

  View abstract →

• Nanosecond repetitively pulsed discharge control of premixed lean methane-air combustion

  POSTER

  Authors

  • Moon Soo Bak

    Stanford University

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

  View abstract →

• Gas-phase Reactive Oxygen and Nitrogen Species in Air Surface Dielectric Barrier Discharges by FTIR and UV spectroscopy

  POSTER

  Authors

  • Hung-wen Chang

    Department of Chemical Engineering, National Taiwan University

  • Yukinori Sakiyama

    Department of Chemical and Biomolecular Engineering, University of California, Berkeley

  • Cheng-che Hsu

    Department of Chemical Engineering, National Taiwan University

  • David Graves

    University of California Berkeley, Department of Chemical and Biomolecular Engineering, University of California, Berkeley, University of California at Berkeley

  View abstract →

• Viability and apoptosis of cultured cancer cells induced by atmospheric pressure plasma jet

  POSTER

  Authors

  • Hea Min Joh

    Dong-A University

  • Sun Ja Kim

    Dong-A University

  • Tae Hun Chung

    Dong-A University

  • Sun Hee Leem

    Dong-A University

  View abstract →

• Effect of Neoangiogenesis Using Micro-spot Atmospheric Pressure Plasma

  POSTER

  Authors

  • Chihiro Tsutsui

    Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Nano Carbon Bio Device Research Center, Tokyo City University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Development of plasma apparatus for plasma irradiation to living cell model

  POSTER

  Authors

  • Yoshiyuki Suda

    Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol.

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Body tissue activation using micro-spot atmospheric pressure plasma source

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  Authors

  • Takumi Kishimoto

    Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan

  • Takamichi Hirata

    Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan

  • Chihiro Tsutsui

    Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Nano Carbon Bio Device Research Center, Tokyo City University

  • Masahiro Akiya

    Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan

  • Akira Mori

    Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan

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• Self-consistent collisional-radiative model for shock tube in Jupiter atmosphere

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    CNR-IMIP Bari

  • Daniela Lucia Pietanza

    CNR-IMIP Bari

  • Giuliano D'Ammando

    CNR-IMIP Bari

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• Effect of the voltage waveform on induced flow of a dielectric barrier discharge plasma actuator

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  • Naohiko Shimura

    Power and Industrial Systems R\&D Center, Toshiba Corporation

  • Motofumi Tanaka

    Power and Industrial Systems R\&D Center, Toshiba Corporation

  • Hiroyuki Yasui

    Power and Industrial Systems R\&D Center, Toshiba Corporation

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• Plasma aerodynamic control of both subsonic and supersonic flows

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  • Seong-kyun Im

    Stanford University

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

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• Plasma assisted combustion of paraffin mixture

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  Authors

  • Oleg Nedybaliuk

    Taras Shevchenko National University of Kyiv

  • Valeriy Chernyak

    Kyiv National Taras Shevchenko University, Taras Shevchenko National University of Kyiv

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Laser Induced Fluorescence Measurements of Ion Velocity in Magnetic Cusped Plasma Accelerators

  POSTER

  Authors

  • Natalia MacDonald

    Stanford University

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

  • William Hargus, Jr

    Air Force Research Laboratory, Edwards AFB

  View abstract →

• Influence Of Secondary Electrons Produced From Plasma Material Interaction In Presence Of Crossed Electric And Magnetic Fields

  POSTER

  Authors

  • Kapil Sawlani

    University of Michigan

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • John Foster

    University of Michigan

  View abstract →

• WO3 nanoparticles modification for electrochromic applications using a plasma rotating reactor

  POSTER

  Authors

  • Muhammed Sancak

    Suleyman Demirel Universitesi

  • Gamze Ongoren

    Suleyman Demirel Universitesi

  • Sorin Manolache

    University of Wisconsin-Madison, Suleyman Demirel University

  • Neslihan Nohut

    Suleyman Demirel Universitesi

  • Ali Gulec

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Aysegul Uygun

    Suleyman Demirel Universitesi

  • Lutfi Oksuz

    Suleyman Demirel University, Suleyman Demirel Universitesi

  View abstract →

• The production of magnetic nanoparticles of Iron Oxide by arc discharge in water

  POSTER

  Authors

  • Hamid Reza Yousefi

    Plasma Physics Research Center, Science and ResearchBranch, Islamic Azad University, Tehran, Iran

  • Sara Fathollah

    Plasma Physics Research Center, Science and ResearchBranch, Islamic Azad University, Tehran, Iran

  • Maryam Nikeyn

    Plasma Physics Research Center, Science and ResearchBranch, Islamic Azad University, Tehran, Iran

  • Shohreh Khatami

    Plasma Physics Research Center, Science and ResearchBranch, Islamic Azad University, Tehran, Iran

  View abstract →

• Study on synthesis processes and crystallinity changes of nanographene materials synthesized by alcohol liquid-plasma

  POSTER

  Authors

  • Hiroki Kondo

    Nagoya University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• PLASMA SCIENCE I

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• Effects of Boundaries on Plasma Jet Formation

  POSTER

  Authors

  • Mehmet Akman

    Old Dominion University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Modeling of radical productions and subsequent decay processes in an atmospheric pressure streamer discharge

  POSTER

  Authors

  • Atsushi Komuro

    The University of Tokyo

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Effect of rare gas and product concentration on the electron kinetics of He/CH4/CO2 mixtures for Syngas production

  POSTER

  Authors

  • Vasco Guerra

    Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade Tecnica de Lisboa, Portugal

  • Andr\'e Janeco

    Instituto Tecnologico e Nuclear, Instituto Superior Tecnico, Universidade Tecnica de Lisboa, Portugal

  • Nuno Pinh\~ao

    Instituto Tecnologico e Nuclear, Instituto Superior Tecnico, Universidade Tecnica de Lisboa, Portugal

  View abstract →

• Experimental characterization of the electron transport across a magnetic field barrier

  POSTER

  Authors

  • F. Gaboriau

    CNRS, Universite de Toulouse

  • R. Baude

    CNRS, Universite de Toulouse

  • L. Liard

    CNRS, Universite de Toulouse

  • G.J.M. Hagelaar

    CNRS, Universite de Toulouse

  View abstract →

• Bi-ionic Dust Solitary Waves

  POSTER

  Authors

  • Julio Puerta

    Universidad Simon Bolivar

  • Pablo Martin

    Universidad Simon Bolivar

  View abstract →

• Determination of collisional quenching rate coefficient of $N_2 (A^3\Sigma _u^+ )$

  POSTER

  Authors

  • Yuusuke Koizumi

    Chiba Institute of Technology

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Nonlocal control of electron temperature in short-discharge plasma with active boundaries

  POSTER

  Authors

  • V.I. Demidov

    WVU

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Control of Electron Energy Distribution Functions Using a Tandem Source Reactor

  POSTER

  Authors

  • Shyam Sridhar

    Department of Chemical and Biomolecular Engineering, University of Houston

  • Lei Liu

    Department of Chemical and Biomolecular Engineering, University of Houston

  • Weiye Zhu

    Department of Chemical and Biomolecular Engineering, University of Houston

  • Hyungjoo Shin

    Department of Chemical and Biomolecular Engineering, University of Houston

  • Vince Donnelly

    Department of Chemical and Biomolecular Engineering, University of Houston, University of Houston

  • Demetre Economou

    Department of Chemical and Biomolecular Engineering, University of Houston

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• Experimental Studies of Laser-Induced Fluorescence of Kr$^+$

  POSTER

  Authors

  • Greg Severn

    Dept. of Physics, University of San Diego, San Diego, CA, 92110, Dept. of Physics, Unversity of San Diego, San Diego, CA, 92110

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• On the application of a physically based higher order fluid model for low-temperature plasmas

  POSTER

  Authors

  • Nathan Garland

    ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Investigation of the temporal sheath dynamics in the intermediate RF regime

  POSTER

  Authors

  • Mohammed Shihab

    Ruhr University Bochum, Inst. for Theoretical Electrical Engineering, Ruhr University Bochum, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • A.T. Elgendy

    Inst. for Theoretical Electrical Engineering, Ruhr University Bochum

  • D. Eremin

    Inst. for Theoretical Electrical Engineering, Ruhr University Bochum

  • T. Mussenbrock

    Inst. for Theoretical Electrical Engineering, Ruhr University Bochum

  • Ralf Peter Brinkmann

    Ruhr-Universit\"at Bochum, Inst. for Theoretical Electrical Engineering, Ruhr University Bochum, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • I. Korolov

    Inst. for Solid State Physics and Optics, Wigner Research Centre for Physics, H.A.S.

  • A. Derzsi

    Inst. for Solid State Physics and Optics, Wigner Research Centre for Physics, H.A.S.

  • Z. Donko

    Inst. for Solid State Physics and Optics, Wigner Research Centre for Physics, H.A.S.

  • Julian Schulze

    Ruhr University Bochum, Inst. for Plasma and Atomic Physics, Ruhr-University Bochum, Ruhr-University Bochum

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• Online platform for simulations of ion energy distribution functions behind a plasma boundary sheath

  POSTER

  Authors

  • Alexander Wollny

    Ruhr University Bochum

  • Mohammed Shihab

    Ruhr University Bochum, Inst. for Theoretical Electrical Engineering, Ruhr University Bochum, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • Ralf Peter Brinkmann

    Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr-University Bochum, Ruhr University Bochum, None, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  View abstract →

• The Bohm Criterion in Collisional Plasmas: Can the Contoversy be solved?

  POSTER

  Authors

  • Ralf Peter Brinkmann

    Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr-University Bochum, Ruhr University Bochum, None, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

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• Plasma-Wall Interaction in Presence of Intense Electron Emission from Walls

  POSTER

  Authors

  • Igor Kaganovich

    Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Fourier Transform Infrared Spectroscopy of Trifluoroiodomethane ICP Discharge

  POSTER

  Authors

  • Cassius Fagioli

    University of Texas at Dallas

  • David Urrabazo

    University of Texas at Dallas, The University of Texas at Dallas, University Of Texas at Dallas

  • Matthew Goeckner

    University of Texas at Dallas, The University of Texas at Dallas, University Of Texas at Dallas

  View abstract →

• In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas

  POSTER

  Authors

  • Keiji Nakamura

    Chubu University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Active Control of the Secondary Electron Emission Coefficient: A New Plasma Control Paradigm?

  POSTER

  Authors

  • David Urrabazo

    University of Texas at Dallas, The University of Texas at Dallas, University Of Texas at Dallas

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Larry Overzet

    The University of Texas at Dallas, University of Texas at Dallas

  • Laxminarayan Raja

    University of Texas, Austin, University of Texas at Austin, The University of Texas at Austin

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Large Volume Plasma Production in SRF Cavities with Complex Geometrical Shape

  POSTER

  Authors

  • Janardan Upadhyay

    Old Dominion University

  • Joseph Newton

    Old Dominion University

  • Alex Godunov

    Old Dominion University

  • Svetozar Popovic

    Old Dominion University

  • Lepsha Vuskovic

    Old Dominion University

  View abstract →

• Adsorption and reactivity of O and N atoms on oxide surfaces under plasma exposure

  POSTER

  Authors

  • D. Marinov

    LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Reaction model for etching surface interacted with hydrofluorocarbon plasmas

  POSTER

  Authors

  • Kenji Ishikawa

    Nagoya University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• 3D feature profile simulation based on realistic surface kinetic studies of silicon dioxide etch process in fluorocarbon plasmas

  POSTER

  Authors

  • Won-Seok Chang

    National Fusion Research Institute

  • Dong-Hun Yu

    Kyung Won Tech.Inc

  • Deog-Gyun Cho

    Chonbuk National University

  • Yeong-Geun Yook

    Chonbuk National University

  • Poo-Reum Chun

    Chonbuk National University

  • Se-A Lee

    Chonbuk National University

  • Deuk-Chul Kwon

    National Fusion Research Institute

  • Mi-Young Song

    National Fusion Research Institute

  • Jung-Sik Yoon

    National Fusion Research Institute

  • Yeon-Ho Im

    Chonbuk National University

  View abstract →

• POST-DEADLINE ABSTRACTS

  View abstract →

• Design of an ECR coaxial microwave plasma source using solid state microwave generator

  POSTER

  Authors

  • Louis Latrasse

    SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Development of a high-power non-ablative capillary discharge source for plasma-materials interactions studies

  ORAL

  Authors

  • Michael Pachulio

    The University of Texas at Austin

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Atmospheric Gaseous Plasma with Large Dimensions

  POSTER

  Authors

  • Sergey Korenev

    Lynntech, Inc.

  View abstract →

• The Pulsed Cylindrical Magnetron for Deposition

  ORAL

  Authors

  • Sergey Korenev

    Lynntech, Inc.

  View abstract →

• Pulmonary and heart diseases with inhalation of atmospheric pressure plasma flow

  POSTER

  Authors

  • Takamichi Hirata

    Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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