Poster Session II (8:00-10:00AM)

Presentations

• PLASMA SCIENCE II

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• Simulation of the OH Emission Molecular Spectrum to Determine the Plasma Temperature and the Influence Noise to Signal Ratio on the Temperature Values

  POSTER

  Authors

  • Hossein Nassar

    Lebanese University

  • Ouloum Aoude

    Lebanese University

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• Measuring effective electron temperatures with the argon 420.1-419.8 nm line ratio

  POSTER

  Authors

  • John B. Boffard

    Deparment of Physics, University of Wisconsin-Madison

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Distribution and Dynamics of Argon Metastables in Supersonic Flowing Microwave Discharges and Post-Discharges

  POSTER

  Authors

  • Milka Nikolic

    Center for Accelerator Science, Old Dominion University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Development of a Thomson-type Mass and Energy Spectrometer for High-energy Plasma Beams with the Geant4 Monte Carlo Toolkit

  POSTER

  Authors

  • Gregory Rieker

    Fluence, LLC

  • Flavio Poehlmann

    Fluence, LLC

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

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• Atmospheric Pressure Plasma Electron Density Measurments by Magnetohydrodynamic Generator (MHDG) Method

  POSTER

  Authors

  • Ali Gulec

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Ferhat Bozduman

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Erdogan Teke

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Lutfi Oksuz

    Suleyman Demirel University, Suleyman Demirel Universitesi

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• Non-intrusive measurements of ion fluxes and densities in pulsed RF plasmas containing nanoparticles

  POSTER

  Authors

  • I. Stefanovic

    Experimental Phys. II, Ruhr Universitaet, Bochum, Germany, Exp. Phys. II, Ruhr-Universitaet Bochum, Germany

  • B. Sikimic

    Exp. Phys. II, Ruhr Universitaet

  • I. Denysenko

    Kharkiv National University Ukraine

  • J. Winter

    Experimental Phys. II, Ruhr Universitaet, Exp. Phys. II, Ruhr Universitaet

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• Measurements of the energies of negative ions produced in processing plasmas

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  Authors

  • David Seymour

    Hiden Analytical

  • David Seymour

    Hiden Analytical

  • David Seymour

    Hiden Analytical

  • David Seymour

    Hiden Analytical

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• On-axis Molecular Beam Mass Spectrometer measurements of a cold atmospheric pressure plasma jet

  POSTER

  Authors

  • J. Winter

    ZIK plasmatis at the INP Greifswald e.V., plasmatis, INP, Greifswald, Germany

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Diagnostic of plasma jet by mid-IR absorption spectroscopy with quantum cascade laser

  POSTER

  Authors

  • S. Iseni

    ZIK plasmatis at the INP Greifswald e.V., plasmatis, INP, Greifswald, Germany

  • M. Duennbier

    ZIK plasmatis at the INP Greifswald e.V., plasmatis, INP, Greifswald, Germany

  • J. Winter

    ZIK plasmatis at the INP Greifswald e.V., plasmatis, INP, Greifswald, Germany

  • K.D. Weltmann

    INP Greifswald e.V., INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP, Greifswald, Germany

  • S. Reuter

    plasmatis at INP Greifswald e.V., ZIK plasmatis at the INP Greifswald e.V., plasmatis, INP, Greifswald, Germany

  View abstract →

• Transmission characteristics of the wave cut-off probe with parallel plates

  POSTER

  Authors

  • Hyun-Ju Kang

    Department of Electrical Engineering, Hanyang University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Non-invasive, real-time measurements of plasma parameters with an industry standard spectrograph

  POSTER

  Authors

  • Shicong Wang

    Department of Electrical and Computer Engineering, University of Wisconsin-Madison

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Collisionless spectral-kinetic Simulation of the Multipole Resonance Probe

  POSTER

  Authors

  • Wladislaw Dobrygin

    Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Daniel Szeremley

    Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Christian Schilling

    Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Jens Oberrath

    Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Denis Eremin

    Ruhr University Bochum, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Thomas Mussenbrock

    Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Ralf Peter Brinkmann

    Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr-University Bochum, Ruhr University Bochum, None, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  View abstract →

• Heavy Neutral Beam Probe Space Potential Measurements of the Helimak Experiment (Te $\sim$ 10 eV)

  POSTER

  Authors

  • Alvaro Garcia de Gorordo

    The University of Texas at Austin, Institute for Fusion Studies, The University of Texas at Austin

  • G.A. Hallock

    The University of Texas at Austin, Institute for Fusion Studies, The University of Texas at Austin

  • K.W. Gentle

    The University of Texas at Austin, Institute for Fusion Studies, The University of Texas at Austin

  View abstract →

• Spatial distributions measurement of negative ion density by using floating probe in the oxygen inductive coupled plasmas

  POSTER

  Authors

  • Hye-Ju Hwang

    Department of Electrical Engineering, Hanyang University

  • Yu-Sin Kim

    Department of Electrical Engineering, Hanyang University

  • Young-Choel Kim

    Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Il-Seo Park

    Department of Electrical Engineering, Hanyang University

  • Chin-Wook Chung

    Department of Electrical Engineering, Hanyang University, Hanyang University

  View abstract →

• Characterization of pulsed plasma jets by wave front distortion analysis

  POSTER

  Authors

  • Benjamin Wang

    Stanford University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

  View abstract →

• Kinetics of Electrons in $Ar/BF_3$ Mixtures

  POSTER

  Authors

  • Zeljka Nikitovic

    Institute of Physics, Belgrade, Serbia

  • Vladimir Stojanovic

    Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia, Institute of Physics, Belgrade, Serbia

  • Svetlana Radovanov

    Varian Semiconductor/SSG/Applied Materials, 35 Dory Road, GL-17, Gloucester, MA01930 USA, Varian Semiconductor Equipment Associates, Inc

  • Zoran Lj. Petrovic

    Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia, Institute of Physics, Belgrade, Serbia

  View abstract →

• 2D and 3D PIC-MCC simulations of a low temperature magnetized plasma on CPU and GPU

  POSTER

  Authors

  • Jonathan Claustre

    LAPLACE, Universite de Toulouse, France

  • Bhaskar Chaudhury

    LAPLACE, Universite de Toulouse, France

  • Gwenael Fubiani

    LAPLACE, Universite de Toulouse, France

  • J.P. Boeuf

    LAPLACE, Universite de Toulouse, LAPLACE, Universite de Toulouse, France

  View abstract →

• Electronegative Plasma Equilibria with Spatially-Varying Ionization

  POSTER

  Authors

  • M.A. Lieberman

    University of California Berkeley, University of California at Berkeley, UC Berkeley

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Space-Charge Limitations in Photon-Enhanced Thermionic Emission and Possible Solutions

  POSTER

  Authors

  • Tsuyohito Ito

    Osaka University

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

  View abstract →

• Hybrid modelling of a DC glow discharge with an analytical ionization source term of fast electrons

  POSTER

  Authors

  • Anatoly Kudryavtsev

    St. Petersburg State University

  • Eugene Bogdanov

    St. Petersburg State University

  • Ismail Rafatov

    Middle East Technical University, Ankara, Turkey

  View abstract →

• Kinetic modeling of electronically enhanced reaction pathways in Plasma Assisted Combustion

  POSTER

  Authors

  • Guy Parsey

    Michigan State University

  • Yaman G\"u\c{c}l\"u

    Michigan State University

  • John Verboncoeur

    Michigan State University

  • Andrew Christlieb

    Michigan State University

  View abstract →

• Simulation of a capacitively coupled oxygen discharge using the oopd1 particle-in-cell Monte Carlo code

  POSTER

  Authors

  • J.T. Gudmundsson

    Shanghai Jiao Tong University

  • M.A. Lieberman

    University of California Berkeley, University of California at Berkeley, UC Berkeley

  View abstract →

• Modeling of low temperature plasma for FOUP cleaning

  POSTER

  Authors

  • Diana Mihailova

    LAPLACE, CNRS and Univ. Toulouse, France

  • G.J.M. Hagelaar

    LAPLACE, CNRS and Univ. Toulouse, France, LAPLACE, CNRS and Univ Toulouse

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Particle based 3D modeling of streamer discharges

  POSTER

  Authors

  • Jannis Teunissen

    Centrum Wiskunde \& Informatica

  • Anbang Sun

    Centrum Wiskunde \& Informatica

  • Chao Li

    Centrum Wiskunde \& Informatica

  • Ute Ebert

    Centrum Wiskunde \& Informatica, Eindhoven University of Technology

  View abstract →

• 3D Spatially hybrid model for streamer discharge

  POSTER

  Authors

  • Anbang Sun

    Centrum Wiskunde \& Informatica

  • Jannis Teunissen

    Centrum Wiskunde \& Informatica

  • Ute Ebert

    Centrum Wiskunde \& Informatica, Eindhoven University of Technology

  View abstract →

• Secondary electron emission induced by fast argon neutrals and its effects on rf plasmas

  POSTER

  Authors

  • Aleksandar Bojarov

    Institute of Physics Belgrade

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• 2D Fluid/Analytical Simulation of MultiFrequency Capacitively Coupled Reactor

  POSTER

  Authors

  • E. Kawamura

    University of California Berkeley

  • M.A. Lieberman

    University of California Berkeley, University of California at Berkeley, UC Berkeley

  • David Graves

    University of California Berkeley, Department of Chemical and Biomolecular Engineering, University of California, Berkeley, University of California at Berkeley

  • A.J. Lichtenberg

    University of California Berkeley

  View abstract →

• Gyrokinetic Simulation for the Advanced Plasma Source

  POSTER

  Authors

  • Benjamin Schroeder

    None

  • Ralf Peter Brinkmann

    Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr-University Bochum, Ruhr University Bochum, None, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  View abstract →

• Study of excitation and emission features in low pressure electronegative oxygen discharges with special regard to the actual electrode surface condition

  POSTER

  Authors

  • Arthur Greb

    York Plasma Institute, University of York, YO10 5DD, York, UK

  • Kari Niemi

    University of York, York Plasma Institute, University of York, YO10 5DD, York, UK, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK

  • Deborah O'Connell

    University of York, York Plasma Institute, University of York, YO10 5DD, York, UK, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK

  • Timo Gans

    University of York, York Plasma Institute, University of York, YO10 5DD, York, UK, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK

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• Particle simulation of a micro inductively coupled plasma source including an external circuit

  POSTER

  Authors

  • Yoshinori Takao

    Department of Aeronautics and Astronautics, Kyoto University, Japan

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Kinetics of Electrons in H$_{2}$O at High Values of Reduced Electric Field

  POSTER

  Authors

  • Zoran Lj. Petrovic

    Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia, Institute of Physics, Belgrade, Serbia

  • Jelena Sivos

    Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia

  • Dragana Maric

    Institute of Physics, University of Belgrade, Serbia, Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia

  • Nikola Skoro

    Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia

  • Vladimir Stojanovic

    Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia, Institute of Physics, Belgrade, Serbia

  View abstract →

• Study of atmospheric pressure discharges with a novel hybrid code

  POSTER

  Authors

  • Denis Eremin

    Ruhr-Universit\"at Bochum

  • Torben Hemke

    Ruhr-Universit\"at Bochum

  • Ralf Peter Brinkmann

    Ruhr-Universit\"at Bochum, Inst. for Theoretical Electrical Engineering, Ruhr University Bochum, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • Thomas Mussenbrock

    Theoretical Electrical Engineering, Ruhr-Universitaet Bochum, Ruhr-Universit\"at Bochum, Institute for Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr University Bochum

  View abstract →

• Optimization of an electron beam exciter via plasma fluid model simulation

  POSTER

  Authors

  • David Urrabazo

    University of Texas at Dallas, The University of Texas at Dallas, University Of Texas at Dallas

  • Stephan Thamban

    University of Texas at Dallas

  • Jimmy Hosch

    Verity Instruments

  • Matthew Goeckner

    University of Texas at Dallas, The University of Texas at Dallas, University Of Texas at Dallas

  View abstract →

• 3D CFDTD PIC/Fluid Hybrid Simulations on Plasma Processing of Materials

  ORAL

  Authors

  • M.C. Lin

    Tech-X

  View abstract →

• Development of a New Industry Focused Plasma Simulation Tool

  ORAL

  Authors

  • Adam Williams

    University College London

  • Sergio L\'opez-L\'opez

    Quantemol Ltd.

  • Derek Monahan

    University College London

  • Will Brigg

    University College London

  • Jonathan Tennyson

    University College London

  View abstract →

• The effect of electrode diameter on the ignition of the dc discharge in nitrogen

  POSTER

  Authors

  • Valeriy Lisovskiy

    Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Axial structure of dc glow discharge negative glow in nitrogen

  POSTER

  Authors

  • Valeriy Lisovskiy

    Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Study of NO formation in a low pressure air-like plasmas at single pulse operation

  POSTER

  Authors

  • Sergej Gorchakov

    INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Normal regime of dc discharge in N$_{2}$O

  POSTER

  Authors

  • Valeriy Lisovskiy

    Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Characteristics of atmospheric pressure microwave plasma torch

  POSTER

  Authors

  • Ferhat Bozduman

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Erdogan Teke

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Ali Gulec

    Suleyman Demirel Universitesi, Suleyman Demirel University

  • Lutfi Oksuz

    Suleyman Demirel Universitesi

  View abstract →

• EEDF evolution in pulsed radio-frequency plasmas

  POSTER

  Authors

  • Ziad El Otell

    Open University UK

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Kinetic simulation of the bounce resonance effect in capacitive discharges and beyond

  POSTER

  Authors

  • Sebastian Wilczek

    Ruhr University Bochum

  • Jan Trieschmann

    Institute for Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr University Bochum

  • Denis Eremin

    Ruhr University Bochum, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Ralf Peter Brinkmann

    Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr-University Bochum, Ruhr University Bochum, None, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Julian Schulze

    Ruhr University Bochum, Inst. for Plasma and Atomic Physics, Ruhr-University Bochum, Ruhr-University Bochum

  • Thomas Mussenbrock

    Theoretical Electrical Engineering, Ruhr-Universitaet Bochum, Ruhr-Universit\"at Bochum, Institute for Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr University Bochum

  View abstract →

• Numerical investigation on fundamental properties in capacitively-coupled methane plasmas for deposition of diamond-like carbon films

  POSTER

  Authors

  • Akinori Oda

    Department of Electric, Electronics and Information Engineering, Chiba Institute of Technology

  • Hiroyuki Kousaka

    Department of Mechanical Science and Engineering, Graduate School of Engineerig, Nagoya University, Graduate School of Engineering, Nagoya University

  View abstract →

• Kinetic simulations of magnetized capacitively coupled discharges

  POSTER

  Authors

  • Jan Trieschmann

    Institute for Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr University Bochum

  • Mohammed Shihab

    Ruhr University Bochum

  • Denis Eremin

    Ruhr University Bochum, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Ralf Peter Brinkmann

    Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr-University Bochum, Ruhr University Bochum, None, Institute for Theoretical Electrical Engineering, Ruhr University Bochum, 44780 Bochum, Germany

  • Julian Schulze

    Ruhr University Bochum, Inst. for Plasma and Atomic Physics, Ruhr-University Bochum, Ruhr-University Bochum

  • Thomas Mussenbrock

    Theoretical Electrical Engineering, Ruhr-Universitaet Bochum, Ruhr-Universit\"at Bochum, Institute for Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr University Bochum

  View abstract →

• Hydrodynamic modelling of ccrf discharge plasmas in oxygen

  POSTER

  Authors

  • Markus M. Becker

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Igor Sheykin

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Detlef Loffhagen

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Christian K\"ullig

    Institute of Physics, University of Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany

  • Kristian Dittmann

    Institute of Physics, University of Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany

  • J\"urgen Meichsner

    Institute of Physics, University of Greifswald, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany

  View abstract →

• The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure

  POSTER

  Authors

  • Anatoly Kudryavtsev

    St. Petersburg State University

  • Konstantin Serditov

    St. Petersburg State University

  View abstract →

• Control of plasma density profile via wireless power transfer in an inductively coupled discharge

  POSTER

  Authors

  • Hee-Jin Lee

    Department of Electrical Engineering, Hanyang University

  • Jin-Young Bang

    Department of Electrical Engineering, Hanyang University, Hanyang University

  • Hyo-Chang Lee

    Department of Electrical Engineering, Hanyang University, Hanyang University

  • Young-Choel Kim

    Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea

  • Chin-Wook Chung

    Department of Electrical Engineering, Hanyang University, Hanyang University

  View abstract →

• Permanent-magnet helicon discharges at 13 and 27 MHz

  POSTER

  Authors

  • Francis F. Chen

    UCLA

  View abstract →

• Warm Magnetized Primary and Secondary Electron Vlasov Equilibria

  POSTER

  Authors

  • Robert Terry

    Enig Associates

  View abstract →

• ABSTRACT WITHDRAWN

  View abstract →

• Variation of spatial distribution of excited species in He/Ar/O$_{2}$ admixtures in an atmospheric pressure plasma jet

  POSTER

  Authors

  • Sarah Taylor

    None

  • Robert Leiweke

    Ues, Inc

  • Biswa Ganguly

    Air Force Research Laboratory

  View abstract →

• Self-organization, generation, annihilation, and dynamics of filaments in dielectric barrier discharges

  POSTER

  Authors

  • J.P. Boeuf

    LAPLACE, Universite de Toulouse, LAPLACE, Universite de Toulouse, France

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Characterization of three kinds of dielectric barrier discharge reactor for surface treatment of polymers

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  • Min Hur

    Korea Institute of Machinery \& Materials

  • Woo Seok Kang

    Korea Institute of Machinery \& Materials

  • Young Hoon Song

    Korea Institute of Machinery and Materials, Korea Institute of Machinery \& Materials

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  • Nakyung Hwang

    Stanford University

  • Seong-kyun Im

    Stanford University

  • Moon Soo Bak

    Stanford University

  • Mark A. Cappelli

    Stanford University, Stanford University Plasma Physics Laboratory

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• Electric arc discharge in the transverse gas flow at atmospheric pressure

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  • Valeriy Chernyak

    Kyiv National Taras Shevchenko University, Taras Shevchenko National University of Kyiv

  • Iryna Prysiazhnevych

    Kyiv National Taras Shevchenko University

  • Evgen Martysh

    Kyiv National Taras Shevchenko University

  • Tamara Lisitchenko

    Kyiv National Taras Shevchenko University

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    Kyrgyz-Russian Slavic University, Bishkek, Kyrgyzstan

  • Belkacem Saghi

    Mohamed Boudiaf University of Science and Technology, Oran, Algeria

  • Bouabdellah Rahmani

    Mohamed Boudiaf University of Science and Technology, Oran, Algeria

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    Voss Scientific

  • Dale Welch

    Voss Scientific

  • Carsten Thoma

    Voss Scientific

  • Robert Clark

    Voss Scientific

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• Experimental study of pulsed corona discharge in air at high pressures

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  • Yunghsu Lin

    University of Southern California

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Estimates of the Electric Field in Fast Ionization Waves

  POSTER

  Authors

  • Benjamin Yee

    University of Michigan

  • Brandon Weatherford

    Sandia National Laboratories

  • Ed Barnat

    Sandia National Laboratories

  • John Foster

    University of Michigan

  View abstract →

• Influence of electrode positions and gas flow on the onset and propagation of an atmospheric pressure plasma jet

  POSTER

  Authors

  • Claire Douat

    Laboratoire de Physique des Gaz et des plasmas - CNRS and Univ. Paris Sud, Orsay, France

  • Gerard Bauville

    Laboratoire de Physique des Gaz et des plasmas - CNRS and Univ. Paris Sud, Orsay, France

  • Michel Fleury

    Laboratoire de Physique des Gaz et des plasmas - CNRS and Univ. Paris Sud, Orsay, France

  • V. Puech

    Laboratoire de Physique des Gaz et des plasmas - CNRS and Univ. Paris Sud, Orsay, France, LPGP, CNRS-UPS, Orsay, France

  View abstract →

• Experimental studies and modeling of microwave plasmas in argon

  POSTER

  Authors

  • M. Andrasch

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Generation of Energetic Species by RF Microplasma Arrays

  POSTER

  Authors

  • W.T. Rawlins

    Physical Sciences Inc., Andover MA

  • S. Lee

    Physical Sciences Inc., Andover MA

  • D.B. Fenner

    Physical Sciences Inc., Andover MA

  • S.J. Davis

    Physical Sciences Inc., Andover MA

  • A.R. Hoskinson

    Electrical and Computer Engineering, Tufts University, Medford MA

  • J. Hopwood

    Electrical and Computer Engineering, Tufts University, Medford MA

  View abstract →

• Radial profile of micro-discharge temperature measured by ultraviolet laser Rayleigh scattering

  POSTER

  Authors

  • Steven Adams

    Air Force Research Laboratory

  • James Caplinger

    Wright State University

  View abstract →

• Surface-wave capillary plasmas in helium: modeling and experiment

  POSTER

  Authors

  • L.L. Alves

    IPFN/IST-UTL, Portugal

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• ABSTRACT WITHDRAWN

  View abstract →

• Kinetic simulations of artificial plasma material structures

  POSTER

  Authors

  • Jan Trieschmann

    Institute for Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr University Bochum

  • Thomas Mussenbrock

    Theoretical Electrical Engineering, Ruhr-Universitaet Bochum, Ruhr-Universit\"at Bochum, Institute for Theoretical Electrical Engineering, Ruhr-University Bochum, Ruhr University Bochum

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• Ionization coefficient measurements in DC microplasmas

  POSTER

  Authors

  • I. Stefanovic

    Experimental Phys. II, Ruhr Universitaet, Bochum, Germany, Exp. Phys. II, Ruhr-Universitaet Bochum, Germany

  • Thomas Kuschel

    Experimental Phys. II, Ruhr Universitaet

  • J. Winter

    Experimental Phys. II, Ruhr Universitaet, Exp. Phys. II, Ruhr Universitaet

  • Dragana Maric

    Institute of Physics, University of Belgrade, Serbia, Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia

  • Zoran Lj. Petrovic

    Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O.BOX 68 11000 Belgrade, Serbia, Institute of Physics, Belgrade, Serbia

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• Investigating voltage recovery after breakdown supercritical nitrogen

  POSTER

  Authors

  • Aram Markosyan

    Centrum Wiskunde and Informatica, Amsterdam

  • Jin Zhang

    Eindhoven University of Technology

  • Bert van Heesch

    Eindhoven University of Technology

  • Ute Ebert

    Centrum Wiskunde and Informatica, Amsterdam

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• Influence of gas composition on characteristics of self-organized pattern formation observed in atmospheric DC glow discharge using liquid anode

  POSTER

  Authors

  • Naoki Shirai

    Tokyo Metropolitan University

  • Satoshi Uchida

    Tokyo Metropolitan University

  • Fumiyoshi Tochikubo

    Tokyo Metropolitan University

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• Atmospheric negative corona discharge using a Taylor cone as liquid electrode

  POSTER

  Authors

  • Ryuto Sekine

    Tokyo Metropolitan University

  • Naoki Shirai

    Tokyo Metropolitan University

  • Satoshi Uchida

    Tokyo Metropolitan University

  • Fumiyoshi Tochikubo

    Tokyo Metropolitan University

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• Plasma-Generated Reactive Species in physiological Solutions

  POSTER

  Authors

  • Malte U. Hammer

    ZIK plasmatis at the INP Greifswald e.V.

  • Helena Tresp

    ZIK plasmatis at the INP Greifswald e.V.

  • Ansgar Schmidt-Bleker

    ZIK plasmatis at the INP Greifswald e.V.

  • J\"orn Winter

    ZIK plasmatis at the INP Greifswald e.V.

  • Klaus-Dieter Weltmann

    INP Greifswald e.V.

  • Stephan Reuter

    ZIK plasmatis at the INP Greifswald e.V.

  View abstract →

• Optical Emission Studies of Micro-Plasma Balls Formed from Laser Induced Breakdown in Water

  POSTER

  Authors

  • L. Huwel

    Wesleyan University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Plasma formation inside deformed gas bubbles submerged in water

  POSTER

  Authors

  • Bradley Sommers

    University of Michigan

  • John Foster

    University of Michigan

  View abstract →

• Time Resolved Spectroscopy: Dynamic Study of a Dielectric Barrier Discharge Plasma

  POSTER

  Authors

  • Sarah Gucker

    University of Michigan - Ann Arbor

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Ambipolar diffusion in strongly electronegative plasma

  POSTER

  Authors

  • Valeriy Lisovskiy

    Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine

  • Vladimir Yegorenkov

    Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine

  View abstract →

• Study of dust particle charge screening within the nonlocal charging theory

  POSTER

  Authors

  • Natalia Demkina

    Troitsk Institute for Innovation and Fusion Research

  • Ivan Derbenev

    Troitsk Institute for Innovation and Fusion Research

  • Natalia Demkina

    Troitsk Institute for Innovation and Fusion Research

  View abstract →

• Anomalous electron density behaviour in dusty plasma afterglow

  POSTER

  Authors

  • Irina Schweigert

    Institute of Theoretical and Applied Mechanics SB RAS

  • Andrey Alexandrov

    Institute of Theoretical and Applied Mechanics SB RAS

  View abstract →

• Electrical asymmetry effect for controlling the transport of micrometer-sized particles in capacitively coupled plasmas

  POSTER

  Authors

  • Shinya Iwashita

    Ruhr University Bochum

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• The technique to measure the internal temperature of particulates/droplets: Two-color laser induced fluorescence

  POSTER

  Authors

  • Daisuke Ogawa

    The University of Texas at Dallas

  • Larry Overzet

    The University of Texas at Dallas, University of Texas at Dallas

  • Matthew Goeckner

    University of Texas at Dallas, The University of Texas at Dallas, University Of Texas at Dallas

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• Hole current confinement effects in elliptic tokamak plasmas with triangularity

  POSTER

  Authors

  • Pablo Martin

    Universidad Simon Bolivar

  • Enrique Castro

    Universidad Simon Bolivar

  • Julio Puerta

    Universidad Simon Bolivar

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• Secondary Electron Yield from Plasma-Treated Niobium

  POSTER

  Authors

  • Milos Basovic

    Center for Accelerator Science, Old Dominion University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Rotating arc plasma characteristics in the presence of methane flame

  POSTER

  Authors

  • Nakyung Hwang

    Stanford University

  • Dae Hoon Lee

    Korea Institute of Machinery and Materials

  • Kwan Tae Kim

    Korea Institute of Machinery and Materials

  • Young Hoon Song

    Korea Institute of Machinery and Materials, Korea Institute of Machinery \& Materials

  View abstract →

• Current Distribution Characterization and Circuit Analysis of a High Energy Pulsed Plasma Deflagration

  POSTER

  Authors

  • Keith Loebner

    Stanford University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Effect of Li in the ITER neutralizer

  ORAL

  Authors

  • Franck Dur\'e

    Laboratoire de Physique des Gaz et des Plasmas - Orsay France

  • Tiberiu Minea

    Laboratoire de Physique des Gaz et des Plasmas - Orsay France

  • Gilles Maynard

    Laboratoire de Physique des Gaz et des Plasmas - Orsay France

  • Agustin Lifschitz

    Laboratoire d'Optique Appliqu\'ee Palaiseau France

  View abstract →

• PLASMA DATA EXCHANGE PROJECT

  View abstract →

• Comparisons of sets of electron-neutral scattering cross sections and calculated swarm parameters in N2 and H2

  POSTER

  Authors

  • Leanne Pitchford

    LAPLACE, CNRS and Univ Toulouse, France

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Comparisons of sets of electron-neutral scattering cross sections and calculated swarm parameters in O2

  POSTER

  Authors

  • Leanne Pitchford

    LAPLACE, CNRS and Univ Toulouse, France

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  View abstract →

• Interpretation of calculated transverse and longitudinal diffusion for electrons in gases

  POSTER

  Authors

  • A.V. Phelps

    JILA and National Inst. of Standards and Technology

  • G.J.M. Hagelaar

    LAPLACE, CNRS and Universite de Toulouse, France

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• Quantemol-N calculation of electron molecule cross sections and related parameters

  ORAL

  Authors

  • Will Brigg

    University College London

  • Adam Williams

    University College London

  • Derek Monahan

    University College London

  • Jonathan Tennyson

    University College London

  View abstract →

• WORKSHOP POSTERS

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• Noninertial Multirelativity

  POSTER

  Authors

  • Florentin Smarandache

    University of New Mexico, Gallup Campus

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• The effect of plasma jet on morphology of the apoptosis cancer cell

  POSTER

  Authors

  • Shahryar Mirpour

    Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, DBD Laboratory, Laser and Plasma Research Institute of Shahid Beheshti University, Evin, Tehran, Iran

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

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• Verification of particle-in-cell simulations with Monte Carlo collisions

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  Authors

  • M.M. Turner

    Dublin City University, Ireland, Dublin City University

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