High pressure noble gas plasmas in microcavities: a review of the discharge physics

ORAL

Abstract

High pressure (from tens to hundreds of Torr) inert gas plasmas confined in microcavities are studied because of both applications and interesting physics. The presentation is a review of research literature on this topic, focusing on the dynamics of electric discharges in microcavities.

Authors

  • Sergey Macheret

    Lockheed Martin Aeronautics Co, Lockheed Martin Aeronautics Company