RF discharge phenomena in miniaturized RF MEMS cavity-based filters

Reconfigurable filters are critical devices for the coming generation of high-frequency electronics. Several competing requirements including miniaturization, performance, frequency-agility and power handling need to be carefully considering in designing successful filters particularly for mobile-form-factor electronics. This talk will discuss the latest findings in state-of-the-art tunable cavity-based RF MEMS filters as relate to the aforementioned factors. Special attention will be paid on the role that RF gas discharge phenomena play in the performance and lifetime of these devices.