PIC Simulations of Atmospheric Pressure Capacitive RF He/N$_2$ Discharges
POSTER
Abstract
Atmospheric pressure rf micro-discharges have been extensively studied, due to emerging applications, particularly in medical and related areas. Because of their small size, diagnostics are difficult. A previous work studied discharges with a helium feed gas and small admixture of N$_2$ by using a 1D hybrid analytical-numerical model [1]. But this model did not consider sheath breakdown phenomena, thus limiting its applicability to the lower power range. To overcome this, we perform 1D particle-in-cell (PIC) simulations of atmospheric pressure capacitve RF He/N$_2$ discharges and use the results to guide the development of a model for the $\gamma$ mode of the discharge. We noted from [1] that the dominant species in He/N$_2$ discharges with 0.1\% N$_2$ were N${_2}^+$ ions, electrons, and metastable helium atoms He$^*$. This enabled us to develop a simplified cross-section set only involving those three species.\\[4pt] [1] C. Lazzaroni, P. Chabert, M.A. Lieberman, A.J. Lichtenberg and A. Leblanc, Plasma Sources Sci. Technol. {\bf 21}, 035012 (2012).
Authors
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E. Kawamura
University of California, Berkeley
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M.A. Lieberman
Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA, University of California, Berkeley
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A.J. Lichtenberg
University of California, Berkeley
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C. Lazzaroni
Universite Paris 13
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P. Chabert
Laboratoire de Physique des Plasmas, LPP-CNRS, LPP, CNRS-Ecole Polytechnique, Ecole Polytechnique