Collisional-radiative model for non-Maxwellian argon plasmas

We have applied our collisional radiative model [1] to inductively-coupled argon plasmas using a non-Maxwellian electron energy distribution function. We included detailed fine-structure cross sections calculated by our relativistic distorted-wave method as well as ionization processes to determine the population of the important excited levels of argon in the plasma for pressures in the range of 1-25 mTorr. We will present detailed results of our calculations and compare these with recent measurements of Boffard et al [2,3] including emission line ratios that can be used to determine plasma temperatures.\\[4pt] [1] R K Gangwar, L Sharma, R Srivastava and A D Stauffer, J. Appl. Phys. 111, 053307 (2012)]\\[0pt] [2] J. B. Boffard, R. O. Jung, C. C. Lin and A. E. Wendt, Plasma Sources Sci. Technol. 19, 065001 (2010)\\[0pt] [3] J. B. Boffard, R. O. Jung, C. C. Lin, L. E. Aneskavich and A. E. Wendt, J. Phy. D: Appl. Phys. 45, 045201 (2012)