Non-invasive electrical method for measurement of electron temperature in an atmospheric pressure plasma jet source

POSTER

Abstract

Electrical diagnostic method of electron temperature using non-perturbed floating harmonic technique is studied in an atmospheric pressure plasma jet source. When a sinusoidal voltage is applied to the quartz tube which surrounds plasma, the received current has harmonic component. From the relation of the harmonic currents with considerations of the collisional sheath and the applied voltage to the sheath, the electron temperature can be obtained. The measured electron temperature is in the range of 2 - 3 eV in helium discharge.

Authors

  • Young-Cheol Kim

    Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Hanyang University

  • Yu-Sin Kim

    Hanyang University

  • Hyo-Chang Lee

    Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Hanyang University

  • Jun-Hyeon Moon

    Hanyang University

  • Chin-Wook Chung

    Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Department of Electrical Engineering, Hanyang University, Hanyang University, Hanyang University, Republic Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea