Measurements of collisionless heating effects in the H-mode of an inductively coupled plasma system

ORAL

Abstract

Inductively coupled plasma systems (ICPs) for processing applications are often operated at low pressures, in the near-collisionless regime. In this regime, the electron mean free path is comparable or larger than the plasma dimensions. The electron dynamics in such ICPs has been investigated here, using phase and space resolved optical emission spectroscopy (PROES) and Langmuir probe measurements. The PROES measurements are also used to calculate the Fourier harmonics components of the 2D excitation (in the radial axial plane). The experimental system is a standard GEC cell with the axial gap of $\sim$4 cm, powered by 13.56 MHz RF power supply. The gas pressure was varied between 0.5 -- 2 Pa. The PROES measurements and Fourier harmonics components confirm many of the previous simulation results in comparable operational regimes. The results show that in the 2D (radial-axial) plane, the plasma power is deposited in a spatially non-uniform and non-linear manner, with axial layers of positive and negative power absorption. The contribution of these nonlinear effects decreases with an increase in the pressure, as observed in previous experimental and simulation results.

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Authors

  • Mujahid Zaka-ul-Islam

    Physics Department, Faculty of Science, Jazan University, Jazan, 2079, Saudi Arabia

  • W.G. Graham

    Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, UK, Queen's University Belfast, UK, Queens University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Queen's University, Belfast

  • Timo Gans

    York Plasma Institute, University of York, UK, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK, University of York, York Plasma Institute, University of York, Heslington York, UK

  • Kari Niemi

    York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK, York Plasma Institute, University of York, Heslington York, UK

  • Deborah O'Connell

    York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK, York Plasma Institute, University of York, UK, York Plasma Institute, University of York, Heslington York, UK