Evolution of Electron Temperature and Coupling between Electron Temperature and Power Absorption
POSTER
Abstract
Authors
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Hyo-Chang Lee
Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Hanyang University
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Seung-Ju Oh
Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea
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Young-Cheol Kim
Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Hanyang University
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Chin-Wook Chung
Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Department of Electrical Engineering, Hanyang University, Hanyang University, Hanyang University, Republic Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea