Evolution of Electron Temperature and Coupling between Electron Temperature and Power Absorption

POSTER

Abstract

Power absorption to plasma is a fundamental and core issue in the field of ionized gases and plasma physics, and it is generally known that in the thermal equilibrium plasma with Maxwellian electron distribution, the power absorption in global model is decoupled to electron temperature (T$_{\mathrm{e}})$. However, we show experimentally and theoretically that T$_{\mathrm{e}}$ is quite coupled to the power absorption. With increase in the power absorption to the plasma, the power absorption and the T$_{\mathrm{e}}$ are abnormally evolved due to a competition between the step-ionizations and the gas heating.

Authors

  • Hyo-Chang Lee

    Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Hanyang University

  • Seung-Ju Oh

    Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea

  • Young-Cheol Kim

    Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Hanyang University

  • Chin-Wook Chung

    Department of Electrical Engineering, Hanyang University, Seoul 133-791, Korea, Department of Electrical Engineering, Hanyang University, Hanyang University, Hanyang University, Republic Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea