Plasma Deposition

Presentations

• Novel plasma catalytic reaction for structural-controlled growth of graphene and graphene nanoribbon

  COFFEE_KLATCH · Invited

  Oct. 4, 2013, 8:30 AM – Oct. 4, 2013, 9:00 AM

  Authors

  • Toshiaki Kato

    Department of Electronic Engineering, Tohoku University

  View abstract →

• A Source of Metal Vapor and Pulsed Beams of High-Energy Gas Molecules

  ORAL

  Oct. 4, 2013, 9:00 AM – Oct. 4, 2013, 9:15 AM

  Authors

  • Alexander Metel

    Moscow State University of Technology ``STANKIN''

  • Vasily Bolbukov

    Moscow State University of Technology ``STANKIN''

  • Marina Volosova

    Moscow State University of Technology ``STANKIN''

  • Sergei Grigoriev

    Moscow State University of Technology ``STANKIN''

  • Yury Melnik

    Moscow State University of Technology ``STANKIN''

  View abstract →

• Diagnostics and Monitoring of a Plasma Beam Source based on Optical Emission Spectroscopy

  ORAL

  Oct. 4, 2013, 9:15 AM – Oct. 4, 2013, 9:30 AM

  Authors

  • Jens Harhausen

    Leibniz Institute for Plasma Science and Technology

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  View abstract →

• Plasma chemistry and scaling parameter in high-current dielectric barrier discharges used for plasma-enhanced CVD of SiO$_{2}$ on polymers

  ORAL

  Oct. 4, 2013, 9:30 AM – Oct. 4, 2013, 9:45 AM

  Authors

  • F. Brehmer

    Eindhoven University of Technology, Eindhoven, The Netherlands

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

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• Atmospheric inductively coupled Ar/H$_{2}$ plasmas jet for low-temperature deposition of Cu Thin Film on Polyimide

  ORAL

  Oct. 4, 2013, 9:45 AM – Oct. 4, 2013, 10:00 AM

  Authors

  • Peng Zhao

    Shizuoka University

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • E.A. Startsev

    Universite de Liege, Liege, Belgium, Universidade Nova de Lisboa, Caparica, Portugal, Universidad Complutense de Madrid, Madrid, Spain, Instituto de Fisica Fundamental, CSIC, Madrid, Spain, CAMS, Flinders University, Adelaide, Australia, Tsinghua University, Henderson State University, ARC CoE for Antimatter - Matter Studies, Flinders University, AMPL, Research School of Physics and Engineering, Institute f\"ur Kernphysik, Goethe Universit\"at, Institut of Physics, Belgrade, Serbia, GREMI, University of Orleans, France, The University of Texas at Austin, Tokyo Electron Ltd., Esgee Technologies Inc., Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea., Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France, Synchrotron Soleil, France, York Plasma Institute, University of York, UK, Department for Electrical Engineering and Information Sciences, Ruhr University Bochum, Eindhoven University of Technology, Eindhoven, The Netherlands, Dutch Institute for Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands, Los Alamos National Laboratory, Center for Optical Materials Science and Engineering Technologies, Clemson University, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald, ZIK plasmatis at the INP Greifswald, Institute of Plasma Physics, Chinese Academy of Sciences, Research and Technology Center, Yazaki Corp., Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands, FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands, Leibniz Institute for Plasma Science and Technology, Kyushu University, The University of Tokyo, Institut Pprime CNRS UPR 3346, Universit\'e de Poitiers, ENSMA, University of Michigan, Ann Arbor, MI, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Houston, Houston, TX, Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Ruhr University Bochum, University of Wisconsin-Madison, MKS Instruments, Hungarian Academy of Sciences, Ruhr-University Bochum, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, Los Alamos National Laboratories, University of Notre Dame, Queen's University Belfast, University of York, University of Mosul, Wigner Research Center for Physics, Budapest, University of Texas at Austin, Tokyo Electron America, Department of Engineering and System Science, National Tsing Hua University, University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, NC State University, Theoretical Electrical Engineering, Ruhr-University Bochum, University of Liverpool, GREMAN, Tours, France, Christian-Albrechts-University of Kiel, Germany, University of Antwerp, Kyoto University, Beihang University, University of Alberta, Princeton Plasma Physics Laboratory, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Muons, Inc., ORNL, Princeton University, Dalian University of Technology, Instituto de Fisica Fundamental, Consejo Superiorde Investigaciones Cientificas, Madrid, Spain, ARC Centre for Antimatter-Matter Studies, Research School of Physical Sciences, Australian National University, Canberra, Australia, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, Adelaide, Australia, Institute of Physics, University of Belgrade, Zemun, Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, Townsville, Australia, Departamentos de Energ\'ia y Ciencias B\'asicas, Universidad Aut\'onoma Metropolitana, M\'exico, Instituto de Ciencias F\'isicas, UNAM, M\'exico, LAPLACE, CNRS and University of Toulouse, France, Department of Physics and Astronomy, The Open University, Walton Hall, MK76aA, United Kingdom, Institute of Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, A-6020 Innsbruck, Austria, Centre for Plasma Physics, Queen's University Belfast, BT71NN, Northern Ireland, Korea Advanced Institute and Technology (KAIST), Gangneung-Wonju National University (GWNU), Institut f\"ur Theoretische Physik, Goethe-Universit\"at, D-60438 Frankfurt, Germany, Department of Physics, National Taiwan University, Taipei 10617, Taiwan, Department of Physics and Astronomy, York University, Toronto, ON M3J1P3, Canada, N.E. Bauman Moscow State Technical University, I.M. Sechenov First Moscow State Medical University, Max-Planck-Institut f\"ur extraterrestrische Physik, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V., Raumfahrtmanagement, Deutsches Zentrum f\"ur Luft- und Raumfahrt e.V. Institut f\"ur Luft- und Raumfahrtmedizin, University of Michigan, University of Sherbrooke, Korea Institute of Science and Technology, University of Twente, TJNAF, Newport News, VA, Center for Accelerator Science, Department of Physics, ODU, Norfolk, VA, Xi'an Jiaotong University, Ruhr-Universitaet Bochum, Graduate School of Engineering, Hiroshima University, Department of Nanoscale Semiconductor Engineering, Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang University, National Fusion Research Institute, Kyung Won Tech.Inc, Chonbuk National University, PPPL, Tokyo Electron America, Austin, TX, Centre Universitaire J.F. Champollion, Albi, Universit\'e de Toulouse \& CNRS, Old Dominion University, University of Illinois at Urbana Champaign, College of Science and Mathematics, UMass Boston, Boston, MA, WVU, Morgantown, WV, PPPL, Princeton, NJ, Nagoya University, Meijo University, Department of Electronic Engineering, Tohoku University., Sandia National Laboratories, Department of Electrical Engineering, Pusan National University, Tech-X Corporation, CEA, IRFM, France, LAPLACE, University of Toulouse, France, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, ZEON CORPORATIO, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, Lam Research Corporation, Curtin University, Mississippi State University, Hokkaido Univ., University of Greifswald, University of Houston, Applied Materials, Department of Physical Sciences, The Open University, Walton Hall, Milton Keynes, MK7 6AA, UK, Institute of Plasmas and Nuclear Fusion, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Faculty of Physics, Sofia University, Sofia, Bulgaria, Centro de Quimica-Fisica Molecular and IN, Instituto Superior Tecnico, Technical University of Lisbon, Portugal, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School, Monterey, CA 93943, USA, Department of Mechanical and Aerospace Engineering, Naval Postgraduate School,Monterey, CA 93943, USA, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, York Plasma Institute, University of York, Centre for Plasma Physics, Queen's University Belfast, Nuclear Physics Institute, Moscow State University, Moscow, Russia, Department of Electrical and Computer Engineering, Seoul National University, South Korea, Research center, SEMES, \#278 Mosi-ri, Cheonan 331-814, South Korea, None, Sulyman Dimeril University, Department of Material Science and Engineering, Seoul National University, 131 dong 404 ho, Gwanak-ro 599, Gwanak-gu, Seoul 151-742, South Korea, Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea, Hokkaid University, National Institute for Fusion Science, Osaka University, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Department of Physics, Dalian Maritime University, School of Physics and Optoelectronic Technology, Dalian University of Technology, Institute of Physics University of Belgrade Serbia, Graduate school of Engineering, Hiroshima University, Beihang University, Princeton Plasma Physics Laboratory, Department of Physics, Auburn University, University of Manchester, Theoretical Division, Los Alamos National Laboratory, CAMS, Flinders University, Universidade Federal de Mato Grosso, Univ Liverpool, United Kingdom, IPFN/IST-UTL, Portugal, Curtin Univ, Australia, Drake Univ, USA, Institute of Physics, Belgrade, Serbia, University of Michigan, USA, University of Minnesota, USA, IPFN/IST-UTL, IPFN/FEUP, Portugal, Tokyo Metropolitan University, Kanazawa University, Centrum Wiskunde and Informatica, Amsterdam, The Ohio State University, Supelec, France, Ecole Centrale Paris, EM2C Laboratory, France, ARC Centre for Antimatter-Matter Studies, School of Chemical and Physical Sciences, Flinders University, ARC Centre for Antimatter-Matter Studies, School of Engineering and Physical Sciences, James Cook University, ARC Centre for Antimatter-Matter Studies, School of Engine ering and Physical Sciences, James Cook University, Laboratoire de Genie des Procedes Plasma et Traitements de Surface, Institut Jean Le Rond d'Alembert, Laboratoire des Sciences des Procedes et Materiaux, Laboratoire de genie des procedes plasma et traitement de surface, France, Laboratoire des Sciences des Procedes et Materiaux, France, Laboratoire des Reactions et Genie des Procedes, France, A.V. Rzhanov Institute of Semiconductor Physics, SB RAS, Department of Electrical Engineering, Pusan National University, Busan 609-735, Hokkaido University, Texas A\&M University, Centre for Plasma Physics, Queen's University Belfast, UK, Centre for Plasma Physics, Queens University of Belfast, Graduate School of Engineering, Nagoya University, NU Eco-Engineering, Co., Ltd., PINSTECH, Islamabad, Govt. College Lahore, LAPLACE, University de Toulouse, France, Moscow Institute of Physics and Technology, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, A. J. Drexel Plasma Institute, A. J. Drexel Plasma Institute. Mechanical Engineering and Mechanics Department, Drexel University, Department of Aeronautics and Astronautics, Kyoto University, Royal Military College of Canada, Kyusyu University, School of Chemistry and Chemical Engineering, Queens University of Belfast, Lab. MSS/MAT, CNRS UMR 8579, Ecole Centrale Paris, 92295 Ch\^atenay Malabry Cedex, Institute of Microelectronics Chinese Academy of Sciences, Ecole Polytechnique, Nagoya Univ., PLANT, Nagoya Univ., PLANT, Nagoya Univ., Tokyo Electron Ltd., Nagoya Univ., Imagineering, Inc., GE Global Research, MSU SINP, Moscow, RF, VNIINM, Moscow, RF, Academy of Opto-electronics, Chinese Academy of Sciences, ITER Organization, CEA, IRFM, Association Euratom-CEA, France, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Dublin City University, University College Dublin, Eindhoven University of Technology, Stanford University, ABB Switzerland Ltd., Corporate Research, Tokyo Institute of Technology, Wesleyan University, Queen's University, Belfast, Institute of Advanced Study in Science and Technology, PPRIME Institute (CNRS - University of Poitiers - ENSMA), EM2C Laboratory, CNRS - Ecole Centrale Paris, Joint Institute for High Temperatures, Russian Academy of Sciences, Max-Planck-Institut fur Extraterrestrische Physik, Germany, Aix-Marseille-Universite, France, Max-Planck-Institut fur Extraterrestrische Physik, Garching, Germany, West Virginia University, Morgantown, WV, University of Alberta, Canada, State Polytechnic University, St. Petersburg, Russia

  • Masaaki Nagatsu

    Shizuoka University

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