Capacitively coupled dc/rf discharges driven by arbitrary linear circuits

POSTER

Abstract

We have developed a method for computing the system of an arbitrary linear circuit coupled to a capacitively coupled plasma discharge. The method relies on the known method of separation of the vacuum and plasma generated fields for the discharge. It is time centered and implicit in the circuit quantities, thus guaranteeing second-order accuracy in time. This method has been implemented in the VSim engine (Vorpal). Numerical verification of the order of accuracy will be shown.

Authors

  • John Cary

    University of Colorado and Tech-X Corporation

  • Ming-Chieh Lin

    Tech-X Corporation

  • C.D. Zhou

    Tech-X Corporation

  • D.N. Smithe

    Tech-X Corporation