Experimental observation of transit time resonance heating through electron energy distribution function measurement in a low pressure inductively coupled plasma

Hyun-Ju Kang; Chin-Wook Chung

Experimental observation of transit time resonance heating through electron energy distribution function measurement in a low pressure inductively coupled plasma

POSTER

Abstract

The maximum electron heating by transit time resonance is related to the driving frequency and the skin depth. In this study, electron energy distribution functions (EEDFs) were measured at various frequencies (8MHz, 10MHz, 13,56MHz) and powers in a low-pressure inductively coupled plasma. It was observed that the heated electron energy on the EEDFs is shifted toward lower energy, as the frequency decreases or the power increases.

Authors

Hyun-Ju Kang
- Department of Electrical Engineering, Hanyang University
Chin-Wook Chung
- Hanyang University
- Department of Electrical Engineering, Hanyang University
- Hanyang Univ.
- Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea
- Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea