A global model study of oxygen discharges -- formation and annihilation of the singlet molecular metastables and effects of the electron energy distribution function

A revised reaction set for oxygen plasma modelling was implemented in a volume average global model that considers only Maxwellian electron energy distribution function. The results showed that the state could be present in the discharge in amounts higher than the state. A further study has been realized through changes in the electron energy distribution function. Differences in the results calculated using Maxwellian and non-Maxwellian distributions demonstrate the importance of using a proper electron energy distribution function in plasma modelling.