Plasma Deposition I

Presentations

• Electrical and Structural Properties of Copper Thin Films Deposited by Novel RF Magnetized Plasma Sputtering with Gyratory Square-Shaped Arrangement by Bar Permanent Magnets

  ORAL

  Oct. 11, 2016, 8:00 AM – Oct. 11, 2016, 8:15 AM

  Authors

  • MD Amzad Hossain

    Graduate School of Science and Engineering, Saga University, Japan

  • Yasunori Ohtsu

    Graduate School of Science and Engineering, Saga University, Japan

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• Lateral epitaxial overgrowth of silicon thick films during nanocluster assisted mesoplasma CVD

  ORAL

  Oct. 11, 2016, 8:15 AM – Oct. 11, 2016, 8:30 AM

  Authors

  • Makoto Kambara

    The University of Tokyo

  • Tesuro Koyano

    The University of Tokyo

  • Yusuke Imamura

    The University of Tokyo

  • Toyonobu Yoshida

    The University of Tokyo, University of Tokyo

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• ABSTRACT WITHDRAWN

  Oct. 11, 2016, 8:30 AM – Oct. 11, 2016, 8:45 AM

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• Dynamics of the formation and loss of boron atoms in a H$_2$/B$_2$H$_6$ microwave plasma

  ORAL

  Oct. 11, 2016, 8:45 AM – Oct. 11, 2016, 9:00 AM

  Authors

  • C. Y. Duluard

    LSPM, CNRS, Universit\'{e} Paris 13, 99 av J.-B. Cl\'{e}ment, 93430 Villetaneuse, France

  • X. Aubert

    LSPM, CNRS, Universit\'{e} Paris 13, 99 av J.-B. Cl\'{e}ment, 93430 Villetaneuse, France

  • N. Sadeghi

    LTM, Univ. Grenoble & CNRS, LIPhy (UMR5588) & LTM (UMR5129), Universit\'{e} de Grenoble & CNRS, Grenoble, France

  • A. Gicquel

    LSPM, CNRS, Universit\'{e} Paris 13, 99 av J.-B. Cl\'{e}ment, 93430 Villetaneuse, France

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• Coatings deposition from liquid HMDSO films via conversion in dielectric barrier discharges

  ORAL

  Oct. 11, 2016, 9:00 AM – Oct. 11, 2016, 9:15 AM

  Authors

  • Sebastian Dahle

    Clausthal University of Technology

  • Wolfgang Maus-Friedrichs

    Clausthal University of Technology

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• Atmospheric Pressure Low Temperature Plasma System for Additive Manufacturing

  ORAL

  Oct. 11, 2016, 9:15 AM – Oct. 11, 2016, 9:30 AM

  Authors

  • Matthew Burnette

    Texas A&M University

  • David Staack

    Texas A\&M University, Texas A&M University

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• Opportunities offered by the interaction of plasma and droplets to elaborate nanostructured oxide materials

  ORAL

  Oct. 11, 2016, 9:30 AM – Oct. 11, 2016, 9:45 AM

  Authors

  • Mehrdad Nikravech

    LSPM-CNRS, Universit\'e Sorbonne Paris Cit\'e, P13, LSPM-Cnrs, Universit\'e Sorbonne Paris cit\'e Paris13

  • Abdelkader Rahmani

    LSPM-CNRS, Universit\'e Sorbonne Paris Cit\'e, P13, LSPM-Cnrs, Universit\'e Sorbonne Paris cit\'e Paris13

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