Poster Session I

Presentations

• PLASMA SCIENCE

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• Numerical simulation of low-temperature helium plasma source for biomedical applications

  POSTER

  Authors

  • Vladimir Bekasov

    St. Petersburg State University

  • Roman Zamchy

    Saint Petersburg State University, St. Petersburg, Russia, St. Petersburg State University

  • Anatoly Kudryavtsev

    St. Petersburg State University, Saint Petersburg State University, St.Petersburg, Russia, Saint-Petersburg State University

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• Surface discharges generated at metal-semiconductor-gas triple junctions.

  POSTER

  Authors

  • D.Z. Pai

    Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), CNRS, Universite de Poitiers

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Generation of anomalously energetic suprathermal electrons by an electron beam interacting with a nonuniform plasma

  POSTER

  Authors

  • Igor Kaganovich

    Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Laboratory, Princeton NJ, USA

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Influence of pressure on ion energy distribution functions in EUV-induced hydrogen plasmas

  POSTER

  Authors

  • T.H.M. van de Ven

    Eindhoven University of Technology

  • P. Reefman

    Eindhoven University of Technology

  • C.A. de Meijere

    ASML

  • V.Y. Banine

    Eindhoven University of Technology and ASML

  • J. Beckers

    Eindhoven University of Technology, The Netherlands, Eindhoven University of Technology

  View abstract →

• PLASMA BOUNDARIES: SHEATHS, BOUNDARY LAYERS, OTHERS

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• Plasma forces on deposited particles

  POSTER

  Authors

  • Lucas Heijmans

    Eindhoven University of Technology

  • Sander Nijdam

    Eindhoven University of Technology

  View abstract →

• Hydrodynamic ion sound instability in systems of a finite length

  POSTER

  Authors

  • O. Koshkarov

    University of Saskatchewan, Saskatoon SK, Canada

  • O. Chapurin

    University of Saskatchewan, University of Saskatchewan, Saskatoon SK, Canada

  • A. Smolyakov

    University of Saskatchewan, Saskatoon SK, Canada

  • Igor Kaganovich

    Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, Princeton, NJ 08543, USA, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Laboratory, Princeton NJ, USA

  • V. Ilgisonis

    National Research Centre Kurchatov Institute, Moscow, Russia

  View abstract →

• What is the size of a floating sheath? An answer

  POSTER

  Authors

  • Farina Voigt

    Institute for Theoretical Electrical Engineering, Ruhr-University Bochum

  • Schabnam Naggary

    Institute for Theoretical Electrical Engineering, Ruhr-University Bochum

  • Ralf Peter Brinkmann

    Institute for Theoretical Electrical Engineering, Ruhr-University Bochum

  View abstract →

• Experimental Study of a Pulsating Anode Spot in Helium

  POSTER

  Authors

  • Benjamin Yee

    Sandia National Laboratories

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• ABSTRACT WITHDRAWN

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• Observation of ExB effect on contact angle of incident deuterium ion at the graphite target of the weakly magnetized plasmas

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  Authors

  • Nam-Kyun Kim

    Seoul National University, Seoul, Korea

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• GAS PHASE PLASMA CHEMISTRY

  View abstract →

• Mechanism of plasma-assisted ignition for H$_{\mathrm{2}}$ and C1-C5 hydrocarbons

  POSTER

  Authors

  • Andrey Starikovskiy

    Princeton University

  • Nikolay Aleksandrov

    Moscow Institute of Physics and Technology

  View abstract →

• Effects of ROS and RNS in non-equilibrium plasma enhanced oxidizing and nitriding

  POSTER

  Authors

  • Vitaly Datsyuk

    Taras Shevchenko National University of Kyiv

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• PLASMA-SURFACE INTERACTIONS

  View abstract →

• Aluminum Surface Morphology Evolution under High-Flux Helium Ions Bombardment

  POSTER

  Authors

  • Oleksii Girka

    V. N. Karazin Kharkiv National University

  • Oleksandr Babych

    V. N. Karazin Kharkiv National University

  • Oleksander Bizyukov

    V. N. Karazin Kharkiv National University

  • Anatolii Chunadra

    V. N. Karazin Kharkiv National University

  • Oleksander Chibisov

    V. N. Karazin Kharkiv National University

  • Ivan Bizyukov

    V. N. Karazin Kharkiv National University

  View abstract →

• Separated effects of ions, metastables and photons on the properties of barrier layers on polymers

  POSTER

  Authors

  • Beatrix Biskup

    Ruhr-Universitaet Bochum

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Composite layers for barrier coatings on polymers

  POSTER

  Authors

  • Markus Brochhagen

    Ruhr-Universitaet Bochum

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Runaway Electron Preionized Diffuse Discharge and Its Impact on Plane Anode.

  POSTER

  Authors

  • Victor Tarasenko

    Head of laboratory

  • Michael Erofeev

    researcher

  • Vasilii Ripenko

    post-doctor

  • Mikhail Shulepov

    junior researcher

  • Evgenii Baksht

    senior researcher

  View abstract →

• PLASMA DIAGNOSTIC TECHNIQUES

  View abstract →

• Electric field strength determination in filamentary DBDs by CARS-based four-wave mixing

  POSTER

  Authors

  • Patrick Boehm

    Ruhr-University Bochum, Institute for Experimental Physics V

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Measurement of Electron Density Using the Multipole Resonance Probe, Langmuir Probe and Optical Emission Spectroscopy in Low Pressure Plasmas with Different Electron Energy Distribution Functions

  POSTER

  Authors

  • Moritz Oberberg

    Ruhr-University Bochum

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Probe measurements of electron energy spectrum in Helium/air micro-plasma at atmospheric pressure.

  POSTER

  Authors

  • V. I. Demidov

    AFRL, WVU

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Time Resolution of Electron Density Measurement using Mach Zehnder Interferometer in Arc Discharge Plasma

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  Authors

  • Takafumi Yamada

    Shizuoka Univ

  • Makoto Matsui

    Shizuoka University, Shizuoka Univ

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• Measuring atomic oxygen densities and electron properties in an Inductively Coupled Plasma for thin film deposition.

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  • David Meehan

    York Plasma Institute, University of York

  • Andrew Robert Gibson

    York Plasma Institute, University of York and Laboratoire de Physique des Plasmas, Ecole Polytechnique, 2LPP, Ecole Polytechnique-CNRS-Uni Paris-Sud-UPMC, 91128 Palaiseau, France

  • Jean-Paul Booth

    LPP, CNRS-Ecole Polytechnique-UPMC, Ecole Polytechnique, Laboratoire de Physique des Plasmas, Ecole Polytechnique, LPP, CNRS, Ecole Polytechnique-UPMC-UPSud-UPSay

  • Erik Wagenaars

    York Plasma Institute, University of York

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• Quantitative measurement of VUV radiation related to polymer pre-treatment in a microwave driven low pressure plasma

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  • Felix Mitschker

    Ruhr-University Bochum

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Developing a diagnostic tool for measuring maximum effective temperature within high pressure electrodeless discharges.

  POSTER

  Authors

  • Michael Whiting

    Ceravision Limited

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Damage development of gallium nitride under plasma exposure

  POSTER

  Authors

  • Daisuke Ogawa

    Chubu University

  • Yoshitsugu Banno

    Chubu University

  • Yoshitaka Nakano

    Chubu University

  • Keiji Nakamura

    Chubu University

  View abstract →

• Time-resolved probe measurement in pulsed plasma using advanced boxcar technique

  POSTER

  Authors

  • Dong-Hwan Kim

    Department of Nanoscale Semiconductor Engineering, Hanyang University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• High time-resolution spatial distribution measurement of the ion flux and the electron temperature in an inductively coupled pulse plasma

  POSTER

  Authors

  • Jihwan Park

    Department of Nanoscale Semiconductor Engineering, Hanyang University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Chinwook Chung

    Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering,Hanyang University, Hanyang University

  View abstract →

• Helium temperature measurements in a hot filament magnetic mirror plasma using high resolution Doppler spectroscopy.

  POSTER

  Authors

  • S. Knott

    University College Cork

  • P.J. McCarthy

    University College Cork

  • A.A. Ruth

    University College Cork

  View abstract →

• Optical emission spectroscopy of 'spokes' in a high power impulse magnetron discharge

  POSTER

  Authors

  • Julian Held

    Ruhr University Bochum

  • Ante Hecimovic

    Ruhr University Bochum

  • Volker Schulz-von der Gathen

    Ruhr University Bochum

  View abstract →

• A computational study of the plasma-flow interplay in a reverse vortex microwave discharge for CO$_{\mathrm{2}}$ conversion

  POSTER

  Authors

  • Vincent Vermeiren

    PLASMANT University of Antwerp

  • Annemie Bogaerts

    Antwerp University, University of Antwerp, Plasmant, Plasmant, University of Antwerp, University of Antwerp, Department of Chemistry, Research group PLASMANT, University of Antwerp, PLASMANT University of Antwerp

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• Higher order moment models of electron transport in gases and liquids

  POSTER

  Authors

  • Nathan Garland

    Physical Sciences, College of Science and Engineering, James Cook University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• On judgement of electron transfer between two regions divided by the separatrix of confronting divergent magnetic fields applied to an inductively coupled plasma

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  Authors

  • Hirotake Sugawara

    Hokkaido University

  • Tappei Yamamoto

    Hokkaido University

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• The Generalized Onsager Model and DSMC Simulations of High-Speed Rotating Flow with Swirling Feed

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  Authors

  • Dr. Sahadev Pradhan

    Dept. of Chemical Engineering, Indian Institute of Science, Bangalore-560 012, India, Dept of Chemical Engineering, Indian Institute of Science, Bangalore-560 012, India

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• The generalized Onsager model and DSMC simulations of high-speed rotating flows with product and waste baffles

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  Authors

  • Dr. Sahadev Pradhan

    Dept. of Chemical Engineering, Indian Institute of Science, Bangalore-560 012, India, Dept of Chemical Engineering, Indian Institute of Science, Bangalore-560 012, India

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• Simulation for spatio-temporal variation of chemically active species in an atmospheric pressure streamer discharge..

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  Authors

  • Atsushi Komuro

    Department of electrical engineering, Tohoku University, Tohoku Univ

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Escape factors for Paschen 2p-1s lines in Ar, Kr, and Xe plasmas.

  POSTER

  Authors

  • Xi-Ming Zhu

    Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

  POSTER

  Authors

  • Michael Friedrichs

    Institute of Product and Process Innovation, Leuphana University Lüneburg

  • Junbo Gong

    Institute of Theoretical Electrical Engineering, Ruhr-University Bochum

  • Ralf Peter Brinkmann

    Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Ruhr-University Bochum, Institute of Theoretical Electrical Engineering, Ruhr-University Bochum,

  • Jens Oberrath

    Institute of Product and Process Innovation, Leuphana University Lueneburg, Germany, Institute of Product and Process Innovation, Leuphana University Lüneburg

  • Sebastian Wilczek

    Institute of Theoretical Electrical Engineering, Ruhr-University Bochum

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• A progress report on the LXCat project

  POSTER

  Authors

  • Sergey Pancheshnyi

    ABB Corporate Research, Switzerland, ABB Corporate Research

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Sputtering, Plasma Chemistry, and RF Sheath Effects in Low-Temperature and Fusion Plasma Modeling

  POSTER

  Authors

  • Thomas G. Jenkins

    Tech-X Corporation

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Comparison of initial seed electron generation mechanisms in kinetic simulations of positive streamers

  POSTER

  Authors

  • Christopher Moore

    Sandia National Laboratories, Sandia Natl Labs

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• A new approach to fluid modeling of Resistive Plate Chambers

  POSTER

  Authors

  • Sasa Dujko

    Institute of Physics, University of Belgrade, Serbia

  • Danko Bosnjakovic

    Institute of Physics, University of Belgrade, Serbia

  • Zoran Petrovic

    University of Belgrade, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Institute of Physics, University of Belgrade, Serbia

  View abstract →

• Complementary approaches to model an RF plasma jet at atmospheric pressure

  POSTER

  Authors

  • F. Sigeneger

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • J. Sch\"afer

    INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • D. Loffhagen

    Leibniz Institute for Plasma Science and Technology, Leibniz Institute for Plasma Science and Technology, Germany, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  View abstract →

• Comparative Study in Stabilization Methods for Capacitively Coupled Plasma Simulation Using Finite Element Method.

  POSTER

  Authors

  • Hyonu Chang

    Plasma Technology Research Center, National Fusion Research Institute

  View abstract →

• Simulation of protons energy relaxation in electron gas by molecular dynamics method

  POSTER

  Authors

  • Andrey Bobrov

    Joint Institute for High Temperatures of the Russian Academy of Sciences

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• A collisional-radiative model for low-pressure weakly magnetized Ar plasmas

  POSTER

  Authors

  • Xi-Ming Zhu

    Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Streamer propagation in air near and on curved dielectrics.

  POSTER

  Authors

  • Anna Dubinova

    Centrum Wiskunde & Informatica

  • Ute Ebert

    CWI Amsterdam and Eindhoven Univ Tech, Netherlands, CWI, Amsterdam and Eindhoven Unviversity of Technology, Centrum Wiskunde & Informatica

  View abstract →

• Development of hybrid computer plasma models for different pressure regimes

  POSTER

  Authors

  • Jakub Hromadka

    Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague

  • Tomas Ibehej

    Faculty of Mathematics and Physics, Charles University, Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague

  • Rudolf Hrach

    Faculty of Mathematics and Physics, Charles University, Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague

  View abstract →

• GLOWS: DC, PULSED, MICROWAVE AND OTHERS

  View abstract →

• Current gain of a pulsed dc discharge in low-pressure gases

  POSTER

  Authors

  • Valeriy Lisovskiy

    Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Applicability of the Child-Langmuir laws versions for describing the glow discharge cathode sheath in CO$_{\mathrm{2}}$

  POSTER

  Authors

  • Valeriy Lisovskiy

    Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Effects of partially covered metallic wave guide on the linear microwave plasma source with TE-TEM power coupling

  POSTER

  Authors

  • Haemaro Kim

    Pusan Natl Univ

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• CAPACITIVELY COUPLED PLASMAS

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• Radial Distribution of Plasma Parameters in an Asymmetric Coaxial Capacitive Discharge

  POSTER

  Authors

  • Jeremy Peshl

    Old Dominion University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Charged particle dynamics and process control in capacitive RF discharges driven by tailored voltage waveforms in mixtures of Argon and CF$_4$

  POSTER

  Authors

  • Steven Brandt

    Department of Physics, West Virginia University, USA

  • Zoltan Donko

    Institute for Solid State Physics and Optics, Budapest, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Hungary, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

  • Julian Schulze

    Institute of Electrical Engineering, Ruhr-University Bochum, Germany ; Department of Physics, West Virginia University, USA

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• PIC/MCC simulation for magnetized capacitively coupled plasmas driven by combined dc/rf sources

  POSTER

  Authors

  • Shali Yang

    Huazhong University of Science and Technology, School of Physics,Wuhan,Hubei,CN, Huazhong University of Science and Technology, School of Physics, Wuhan, Hubei, CN

  • Ya Zhang

    Huazhong University of Science and Technology, School of Physics, Wuhan, Hubei, CN

  • Wei Jiang

    Huazhong University of Science and Technology, School of Physics,Wuhan,Hubei,CN, Huazhong University of Science and Technology, School of Physics, Wuhan, Hubei, CN

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms

  POSTER

  Authors

  • Julian Schulze

    Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Institute for Electrical Engineering, Ruhr-University Bochum, Germany

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Spatial structure of plasma density and electron temperature in capacitive RF discharges with a single ring-shaped narrow trench of various depths

  POSTER

  Authors

  • Julian Schulze

    Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Institute for Electrical Engineering, Ruhr-University Bochum, Germany

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• INDUCTIVELY COUPLED PLASMAS

  View abstract →

• Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling

  POSTER

  Authors

  • Hyo-Chang Lee

    Korea Research Institute of Standards and Science (KRISS)

  • Chinwook Chung

    Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering,Hanyang University, Hanyang University

  View abstract →

• Coupling mechanisms in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable relative phase

  POSTER

  Authors

  • Thomas Steinberger

    Department of Physics, West Virginia University, Morgantown, USA

  • Birk Berger

    Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Effects of hydrogen as sheath gas on properties of inductive coupled thermal plasma for B$_{\mathrm{4}}$C/Cu functionally gradient material preparation

  POSTER

  Authors

  • Qijia Guo

    Institute of Plasma Physics, Chinese Academy of Sciences, PO Box 1126, Hefei 230031, China

  • Peng Zhao

    Institute of Plasma Physics, Chinese Academy of Sciences, PO Box 1126, Hefei 230031, China

  • Lin Li

    Institute of Plasma Physics, Chinese Academy of Sciences, PO Box 1126, Hefei 230031, China

  • Guohua Ni

    Institute of Plasma Physics, Chinese Academy of Sciences, PO Box 1126, Hefei 230031, China

  • Xiaodong Zhang

    Institute of Plasma Physics, Chinese Academy of Sciences, PO Box 1126, Hefei 230031, China

  View abstract →

• Electron heating in the inductive discharge array (IDA): theoretical concept and first measurements

  POSTER

  Authors

  • Philipp Ahr

    Institute for Plasma and Atomic Physics, Ruhr-University Bochum

  • Uwe Czarnetzki

    Institute for Plasma and Atomic Physics, Ruhr-University Bochum

  View abstract →

• MAGNETICALLY ENHANCED PLASMAS: ECR, HELICON, MAGNETRON, OTHERS

  View abstract →

• Generation of off-axially localized tail electrons in helical antenna produce cylindrical plasma.

  POSTER

  Authors

  • Sonu Yadav

    Institute for Plasma Research

  • Soumen Ghosh

    Institute for Plasma Research

  • Sayak Bose

    Institute for Plasma Research

  • P K Chattopadhyay

    Institute for Plasma Research

  • J Ghosh

    Institute for Plasma Research

  • D Bora

    Institute for Plasma Research

  View abstract →

• Plasma Parameters Characterization of Large Diameter Inverted Cylindrical Magnetron Discharge.

  POSTER

  Authors

  • Ramkrishna Rane

    Institute for Plasma Research

  • Subrato Mukherjee

    Institute for Plasma Research

  View abstract →

• Time resolved ion energy distribution functions of non-reactive and reactive high power impulse magnetron sputtering of titanium

  POSTER

  Authors

  • Katharina Grosse

    Ruhr-University Bochum

  • Wolfgang Breilmann

    Ruhr-University Bochum

  • Christian Maszl

    Ruhr-University Bochum, Institute of Experimental Physics II, Ruhr-University Bochum

  • Jan Benedikt

    Ruhr-University Bochum

  • Achim von Keudell

    Ruhr-University Bochum

  View abstract →

• HIGH PRESSURE DISCHARGES: DIELECTRIC BARRIER, DISCHARGES, CORONAS, BREAKDOWN, SPARKS

  View abstract →

• Fast optical and electrical diagnostics of pulsed spark discharges in different gap geometries

  POSTER

  Authors

  • Hans H\"{o}ft

    INP Greifs\-wald, Felix-Hausdorff-Str.\ 2, 17489 Greifswald, Germany

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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    National Defense Academy

  • Tomokazu Yoshinaga

    National Defense Academy

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    Eindhoven University of Technology

  • J.C.P.Y. Nobelen

    Eindhoven University of Technology

  • S. Nijdam

    Eindhoven University, Eindhoven University of Technology, Department of Applied Physics, Eindhoven University of Technology, Eindhoven University of Technology, The Netherlands

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    IPP, CAS, Prague, Institute of Plasma Physics of the CAS, Prague, Czech Republic, Institute of Plasma Physics of the CAS Prague

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    Institute of Plasma Physics of the CAS Prague

  • Milan Simek

    IPP, CAS, Prague, Institute of Plasma Physics of the CAS, Prague, Czech Republic, Institute of Plasma Physics of the CAS Prague

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    University of Michigan

  • Kenneth W. Engeling

    University of Michigan

  • John Foster

    University of Michigan, University of Michigan - Ann Arbor, Univ of Michigan - Ann Arbor

  • Mark J. Kushner

    University of Michigan, Electrical Engineering and Computer Science Dept., University of Michigan

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  • Xuechun Li

    Dalian University of Technology

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Spatial profiles of the cathode layer parameters in the strongly constricted and diffuse atmospheric pressure glow discharges.

  POSTER

  Authors

  • Leanid Simonchik

    Institute of Physics of NAS of Belarus, Institute of physics of NAS of Belarus

  • Valery Arkhipenko

    Institute of physics of NAS of Belarus

  • Aliaksandra Kazak

    Institute of physics of NAS of Belarus

  View abstract →

• 1D fluid model of the dielectric barrier discharge in chlorine

  POSTER

  Authors

  • Svetlana Avtaeva

    Novosibirsk State University

  View abstract →

• MICRODISCHARGES: DC, RF, MICROWAVE

  View abstract →

• Investigation of atmospheric pressure glow microdischarge between flat cathode and needle anode in helium and argon.

  POSTER

  Authors

  • Alexander Astafiev

    Saint Petersburg State University, St. Petersburg, Russia

  • Vladimir Belyaev

    Saint Petersburg State University, St. Petersburg, Russia

  • Roman Zamchy

    Saint Petersburg State University, St. Petersburg, Russia, St. Petersburg State University

  • Anatoly Kudryavtsev

    Saint Petersburg State University, St. Petersburg, Russia

  • Olga Stepanova

    Saint Petersburg State University, St. Petersburg, Russia

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Metastable densities in rf-driven atmospheric pressure microplasma jets in argon and helium

  POSTER

  Authors

  • Marc Boeke

    Ruhr-Universitaet Bochum

  • Stefan Spiekermeier

    Ruhr-Universitaet Bochum

  • Joerg Winter

    Ruhr-Universitaet Bochum

  View abstract →

• OH rotational temperature measurements via a two temperature distribution analysis in plasma with water microdroplets

  POSTER

  Authors

  • Masanao Tsumaki

    Osaka University

  • Tsuyohito Ito

    Osaka University

  View abstract →

• Reactive Microplasma Discharge for In-Situ Study of Surface Modification

  POSTER

  Authors

  • Sophia Gershman

    Princeton Plasma Physics Laboratory

  • Yevgeny Raitses

    Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Lab

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• Interaction between a microplasma array and an adjacent dielectric surface

  POSTER

  Authors

  • Sebastian Dzikowski

    Ruhr-Universitaet Bochum

  • Volker Schulz-von der Gathen

    Ruhr University Bochum, Ruhr-Universitaet Bochum

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• Net Emission Coefficients for Copper and Iron Plasmas

  POSTER

  Authors

  • Frank Kassubek

    ABB Corporate Research, Baden-D\"attwil, Switzerland

  • Oded Zilberberg

    ABB Corporate Research, Baden-D\"attwil, Switzerland; ETH Z\"urich, Institute for Theoretical Physics

  • Charles Doiron

    ABB Switzerland Ltd., ABB Corporate Research, Baden-D\"attwil, Switzerland

  View abstract →

• THERMAL PLASMAS: ARCS, JETS, SWITCHES, OTHERS

  View abstract →

• Characterization, mechanical, and corrosion properties of chromium carbide films by using a 90$\circ $bend magnetic filtered cathodic vacuum arc (FCVA) method

  POSTER

  Authors

  • Chih-Chiang Wang

    National Chung Hsing University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Arc Conductance and Flow Velocity Affected by Transient Recovery Voltage

  POSTER

  Authors

  • Reo Fukuoka

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Reo Fukuoka

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Reo Fukuoka

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Reo Fukuoka

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Reo Fukuoka

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Reo Fukuoka

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  View abstract →

• Distribution of Argon Arc Contaminated with Nitrogen as Function of Frequency in Pulsed TIG Welding

  POSTER

  Authors

  • Hiroki Takahashi

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Hiroki Takahashi

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Hiroki Takahashi

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  • Hiroki Takahashi

    Tokyo City University, Setagaya, Tokyo 158-8557, JAPAN

  View abstract →

• Study of transfer efficiency in a screw pinch plasma

  POSTER

  Authors

  • Alexander Puth

    IAP, Goethe-University Frankfurt am Main

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Removal of Oxide Layer Using Vacuum Arc Cathode Spot with Transverse External Magnetic Field

  POSTER

  Authors

  • Shiko Kaneda

    Tokyo City University, Setagaya, Tokyo 158-8557, Japan

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Applying a laser-induced incandescence (LII) diagnostic to monitor nanoparticle synthesis in an atmospheric plasma, \textit{in situ}

  POSTER

  Authors

  • Shurik Yatom

    Princeton Plasma Physics Lab

  • James Mitrani

    Princeton Plasma Physics Lab

  • Yao-Wen Yeh

    Princeton Plasma Physics Laboratory, Princeton University

  • Mikhail Shneider

    Princeton University

  • Brentley Stratton

    Princeton Plasma Physics Laboratory, Princeton Plasma Physics Lab

  • Yevgeny Raitses

    Princeton Plasma Phys Lab, Princeton Plasma Physics Laboratory, Princeton Plasma Physics Laboratory, USA, Princeton Plasma Physics Lab

  View abstract →

• PLASMAS IN LIQUIDS

  View abstract →

• Pulsed picosecond and nanosecond discharge development in liquids with various dielectric permittivity constants

  POSTER

  Authors

  • Andrey Starikovskiy

    Princeton University

  View abstract →

• Evolution of Spatial pH Distribution in Aqueous Solution induced by Atmospheric Pressure Plasma

  POSTER

  Authors

  • Shigenori Takahashi

    Department of Chemical Engineering, Nagoya University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Emission spectroscopyp of single buble sonoluminescence using argon mixuture water

  POSTER

  Authors

  • Ryoko Yamada

    Shizuoka Univ

  • Makoto Matsui

    Shizuoka University, Shizuoka Univ

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Imaging diagnostics of pulsed plasma discharges in saline generated with various sharp pin powered electrodes

  POSTER

  Authors

  • L. Asimakoulas

    Centre for Plasma Physics, Queen's University Belfast

  • Mohammad Karim

    Centre for Plasma Physics, Queen's University Belfast, Queen's University Belfast, N.Ireland

  • L. Dostal

    Brno University of Technology

  • F. Krcma

    Brno University of Technology

  • Bill Graham

    Centre for Plasma Physics, Queen's University Belfast, Queen’s University Belfast, Centre for Plasma Physics

  • T. A. Field

    Centre for Plasma Physics, Queen's University Belfast

  View abstract →

• Investigation Of The High-Voltage Discharge On The Surface Of Gas-Liquid System

  POSTER

  Authors

  • Shi Nguyen-Kuok

    None

  • Shi Nguyen-Kuok

    None

  • Shi Nguyen-Kuok

    None

  • Shi Nguyen-Kuok

    None

  View abstract →

• ABSTRACT WITHDRAWN

  View abstract →

• Experimental study of low-temperature plasma of electrical discharges with liquid electrodes

  POSTER

  Authors

  • Viktor Zheltukhin

    Kazan National Research Tecnological University, Kazan National Research Technological University

  • Almaz Gaisin

    A.N.Tupolev's Kazan National Research Technical University-KAI

  View abstract →

• NEGATIVE ION AND DUST PARTICLE CONTAINING PLASMAS

  View abstract →

• Synthesis, transport, and retention of tin nanodroplets in a magnetron sputtering source combined with a capacitively-coupled plasma

  POSTER

  Authors

  • K. Sasaki

    Hokkaido University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Dust formation and dynamic in magnetized and non-magnetized microwave discharge.

  POSTER

  Authors

  • Karim Ouaras

    Laboratoire de Physique des Gaz et des Plasmas, CNRS (UMR8578), Université Paris-Sud, Bât. 210, 91405 Orsay Cedex, France

  • Guillaume Lombardi

    LSPM-CNRS Université Paris 13, Sorbonne Paris Cité, F-93490 Villetaneuse, France

  • Khaled Hassouni

    LSPM-CNRS Université Paris 13, Sorbonne Paris Cité, F-93490 Villetaneuse, France

  View abstract →

• Hybrid simulation of nanoparticle growth and transport in a pulsed RF CCP sustained in silane

  POSTER

  Authors

  • Wen-Zhu Jia

    PSEG, Dalian University of Technology

  • Yuan-Hong Song

    PSEG, Dalian University of Technology

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Numerical studies from quantum to macroscopic scales of carbon nanoparticules in hydrogen plasma

  POSTER

  Authors

  • Guillaume Lombardi

    CNRS LSPM - University Paris 13

  • Alain Ngandjong

    ITODYS - University Paris Diderot

  • Zsolt Mezei

    CNRS LSPM - University Paris 13

  • Jonathan Mougenot

    CNRS LSPM - University Paris 13

  • Armelle Michau

    CNRS LSPM - University Paris 13

  • Khaled Hassouni

    CNRS LSPM - University Paris 13

  • Mahamadou Seydou

    ITODYS - University Paris Diderot

  • François Maurel

    ITODYS - University Paris Diderot

  View abstract →

• Interaction of UV laser pulses with reactive dusty plasmas

  POSTER

  Authors

  • Ferdi van de Wetering

    Eindhoven University of Technology, The Netherlands

  • J. Beckers

    Eindhoven University of Technology, The Netherlands, Eindhoven University of Technology

  • S. Nijdam

    Eindhoven University, Eindhoven University of Technology, Department of Applied Physics, Eindhoven University of Technology, Eindhoven University of Technology, The Netherlands

  • Wouter Oosterbeek

    Eindhoven University of Technology, The Netherlands

  • Eva Kovacevic

    GREMI UMR 7344 CNRS&Universite d'Orleans, France, GREMI UMT 7344 CNRS&Universite d'Orleans, France

  • Johannes Berndt

    GREMI UMR 7344 CNRS&Universite d'Orleans, France, GREMI UMT 7344 CNRS&Universite d'Orleans, France

  View abstract →

• Mode transitions and electronegativity in oxygen CCP and ICP.

  POSTER

  Authors

  • Juergen Meichsner

    University of Greifswald

  • Thomas Wegner

    University of Greifswald

  View abstract →

• OTHER PLASMA SCIENCE TOPICS

  View abstract →

• Neutrosophic Triplet as extension of Matter Plasma, Unmatter Plasma, and Antimatter Plasma

  POSTER

  Authors

  • Florentin Smarandache

    University of New Mexico

  • Mumtaz Ali

    Quaid-i-azam University Islamabad, Pakistan

  View abstract →

• Efficient Technique to Evaluate the Lindhard Dielectric Function.

  POSTER

  Authors

  • Lorenzo Ugo Ancarani

    Universite de Lorraine, France, Universite de Lorraine, Universite de Lorraine, Metz, France

  • Herve Jouin

    Universite de Bordeaux

  View abstract →

• Discharge-pumped XUV source.

  POSTER

  Authors

  • Jiri Schmidt

    Institute of Plasma Physics of the CAS

  • Karel Kolacek

    Institute of Plasma Physics of the CAS

  • Jaroslav Straus

    Institute of Plasma Physics of the CAS

  • Oleksandr Frolov

    Institute of Plasma Physics of the CAS

  View abstract →

• Energy flux to substrate in high-power impulse magnetron sputtering measured by using optical low-coherence interferometry

  POSTER

  Authors

  • Katsuhiro Hattori

    Meijo university

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Network structural analysis using directed graph for chemical reaction analysis in weakly-ionized plasmas

  POSTER

  Authors

  • Kyosuke Nobuto

    The University of Shiga Prefecture

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• PLASMA APPLICATIONS

  View abstract →

• Simplification of the laser absorption process in the particle simulation for the laser-induced shockwave processing

  POSTER

  Authors

  • Kohei Shimamura

    University of Tsukuba

  View abstract →

• PLASMA ETCHING

  View abstract →

• ABSTRACT WITHDRAWN

  View abstract →

• Plasma Treatment of Metal Surface by Runaway Electrons Preionized Diffuse Discharge

  POSTER

  Authors

  • Victor Tarasenko

    Head of laboratory

  • Michael Erofeev

    researcher

  • Vasilii Ripenko

    post-doctor

  • Mikhail Shulepov

    junior researcher

  View abstract →

• Plasma Etching of superconducting radio frequency cavity by Ar/Cl$_{\mathrm{2}}$ capacitively coupled Plasma

  POSTER

  Authors

  • Janardan Upadhyay

    Old Dominion University

  • Svetozar Popovic

    Old Dominion University

  • Anne-Marie Valente-Feliciano

    Jefferson Lab

  • Larry Phillips

    Jefferson Lab

  • Lepsha Vuskovic

    Old Dominion University

  View abstract →

• PLASMA DEPOSITION

  View abstract →

• ABSTRACT WITHDRAWN

  View abstract →

• Investigation of the synthesized graphene on the copper foil depending on the plasma condition.

  POSTER

  Authors

  • Hyunjae Park

    National fusion research institute

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Solid coatings deposited from liquid methyl methacrylate via Plasma Polymerization

  POSTER

  Authors

  • Lisa Wurlitzer

    Clausthal University of Technology

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Measurement of dielectric-film thickness at low density plasma

  POSTER

  Authors

  • Sang-Bum Jeon

    Department of Electrical Engineering, Hanyang University, South Korea

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• GREEN PLASMA TECHNOLOGIES: ENVIRONMENTAL AND ENERGY APPLICATIONS

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• Temporally resolved plasma spectroscopy for analyzing natural gas components

  POSTER

  Authors

  • Kazunobu Kobayashi

    Osaka Gas Co., Ltd.

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Conversion of high-pressure carbon dioxide by laser-induced plasma

  POSTER

  Authors

  • Taku Goto

    Osaka University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Tsuyohito Ito

    Osaka University

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• The purification mechanism of wastewater by underwater discharge

  POSTER

  Authors

  • Kangil Kim

    National Fusion Research Institute

  • Suk Hwal Ma

    National Fusion Research Institute

  • Jin Young Huh

    National Fusion Research Institute

  • Yong Cheol Hong

    National Fusion Research Institute

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• EMF generation in low-temperature plasma

  POSTER

  Authors

  • Alexander Pal

    SRC RF Troitsk Institute for Innovation and Fusion Research, 142190 Troitsk, Moscow, Russia

  • Valery Babichev

    SRC RF Troitsk Institute for Innovation and Fusion Research, 142190 Troitsk, Moscow, Russia

  • Nikolay Dyatko

    SRC RF Troitsk Institute for Innovation and Fusion Research, 142190 Troitsk, Moscow, Russia

  • Anatoly Filippov

    SRC RF Troitsk Institute for Innovation and Fusion Research, 142190 Troitsk, Moscow, Russia

  • Andrey Starostin

    SRC RF Troitsk Institute for Innovation and Fusion Research, 142190 Troitsk, Moscow, Russia

  View abstract →

• BIOLOGICAL APPLICATIONS OF PLASMAS

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• Effect of sheath gas in atmospheric-pressure plasma jet for potato sprouting suppression

  POSTER

  Authors

  • S. Nishiyama

    Hokkaido University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Cysteine as a Biological Probe for Comparing Plasma Sources

  POSTER

  Authors

  • Jan-Wilm Lackmann

    Biomedical Applications of Plasma Tech., Ruhr Univ Bochum

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• Promotion of cell proliferation using atmospheric-pressure radical source

  POSTER

  Authors

  • Masafumi Ito

    Meijo University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

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• PLASMA PROPULSION AND AERODYNAMICS

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• Ion acceleration in electrodeless plasma thrusters

  POSTER

  Authors

  • Trevor Lafleur

    LPP Ecole Polytechnique, and Centre National d'Etudes Spatiale (CNES), Ecole Polytechnique, CNES, Ecole Polytechnique

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Dynamic stall control by plasma actuators with combined energy/momentum action.

  POSTER

  Authors

  • Andrey Starikovskiy

    Princeton University

  • Richard Miles

    Princeton University

  View abstract →

• Plasma guiding and deflection of high speed projectiles.

  POSTER

  Authors

  • Andrey Starikovskiy

    Princeton University

  • Richard Miles

    Princeton University

  View abstract →

• Effect of segmented electrode length on the performances of Hall thruster

  POSTER

  Authors

  • Ping Duan

    Dalian Maritime University

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  View abstract →

• Effect of plasma distribution on propulsion performance in electrodeless plasma thrusters

  POSTER

  Authors

  • Yoshinori Takao

    Yokohama National University, Kyoto University, Yokohama National Univ

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001 Lisbon, Portugal, Institut für Energie- und Klimaforschung, Plasmaphysik, Forschungszentrum Jülich GmbH, Jülich 52425, Germany, Institute for Plasma and Atomic Physics, Ruhr University Bochum, Bochum 44780, Germany, Joint Institute for High Temperatures of the Russian Academy of Sciences, Sandia Natl Labs, Tech-X Corporation, LAPLACE, CNRS and University of Toulouse, Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China, Department of electrical engineering, Tohoku University, Physical Sciences, College of Science and Engineering, James Cook University, Gaseous Electronics Laboratory, Institute of Physics, University of Belgrade, Department of Nanoscale Semiconductor Engineering, Hanyang University, Memory E Technology Team, Samsung Electronics, Ceravision Limited, UES Inc., INTEPH Technologies LLC, WVU, AFRL, Ruhr-University Bochum, Institute for Experimental Physics V, INP Greifswald, Ruhr-Universitaet Bochum, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Seoul National University, Seoul, Korea, Sandia National Laboratories, University of Iowa, Tokyo Electron America, Austin, Texas 78741, USA, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany, KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany, Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany, Kochi University of Technology, Seikei University, Tokyo, Japan, Queen's University Belfast, N.Ireland, Department of Physics, West Virginia University, Morgantown, USA and Institute for Electrical Engineering, Ruhr-University Bochum, Germany, School of Physics, Dalian University of Technology, China, Department of Physics, West Virginia University, USA, Tokyo Electron Ltd., CNES Launcher Directorate, ONERA, Theoretical Electrical Engineering, Ruhr University Bochum, Germany, Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Microwave Department, Ferdinand-Braun-Institut, Germany, Department of Electrical Engineering,Pusan National University, Busan, South Korea, Institute for Experimental Physics II, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum, INP Greifswald e.V., Department of Chemistry, University of Oxford, United Kingdom, Univ. Paris-Sud, Université Paris-Saclay, Department of Electronic Engineering, Tohoku University, LOA, CNRS, CenTACat, Queen’s University Belfast, N. Ireland, U.K, Centre for Plasma Physics, Gas Institute of National Academy of Sciences of Ukraine, Technische Universiteit Eindhoven, Saint Petersburg State University, Middle East Technical University, Semiconductor R&D Center, Samsung Electronics Co., Plasmetrex GmbH, Institute of Product and Process Innovation, Leuphana University Lüneburg, Institute of Microwave System, Ruhr University Bochum, Functional Materials and Coating Technologies, Robert Bosch GmbH, University of Mons, Ruhr University, Osaka University, Japan; Institute of Physics, Belgrade; Toyko Electron

  • Satoshi Hamaguchi Zoran Petrovic, Peter Ventezek

    Cancer Research Unit, University of York, Dep. of Urology, Castle Hill Hospital \& Hull York Medical School, University of Hull, York Plasma Institute, University of York, Ehime University, Y's Corp., Pearl Kogyo Co., Ltd., Ruhr University Bochum, Bochum, Germany, Wigner Research Center for Physics, Budapest, Hungary, Chungnam National University, Univ. of Kentucky, Illinois Wesleyan Univ., Air Force Research Laboratory, Illinois State University, Nagoya Univ., LPP, Ecole Polytechnique, France, GREMI, Orleans, France, University of Minnesota, University of Maryland, Dep. of Chemistry, University of York, Synchrotron SOLEIL, LPP Ecole Polytechnique-CNRS, Ruhr-University Bochum, Research Group Reactive Plasmas, Institute for Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany, Eindhoven University of Technology, PMP, Eindhoven, The Netherlands, Ruhr University Bochum, Germany, Hokkaido University, National Institute for Fusion Science, Philips Lighting, Faculty of Physics, Weizmann Institute of Science, Forschungszentrum J\"{u}lich GmbH, Institut f\"{u}r Energie- und Klimaforschung – Plasmaphysik, 42425 J\"{u}lich, Institut für Plasma und Atomphysik, Ruhr-Universit\"{a}t Bochum, 44780 Bochum, Texas A\&M University, Physics Department, Technion, Nagoya University, Kyusyu University, University of Anterwerp, SPTS Technologies, University College London, Quantemol, Consejo Superior de Investigaciones Cient\'ificas, Flinders Univ, Universidade Nova de Lisboa, Centro de Investigaciones Energ\'eticas Medioambientales y Tecnol\'ogicas, Universidad Complutense de Madrid, Hospital Universitario Ram\'on y Cajal, Meijo University, NU Eco Engineering, Co., LTD., Institute of Electrochemistry, Clausthal University of Technology, Department of Physics, Azad University, Iran, Mechanical engineering, Korea advanced institute of science and technology, Vacuum center, Korea research institute of standard and science, Physics, Chungnam national university, Ruhr University Bochum, The University of Tokyo, Yokohama National University, Institut PPRIME (CNRS UPR 3346, Université de Poitiers, ISAE-ENSMA), Natl Fusion Res Inst, Seoul National Univerity, Hanwha chemical coorperation, Forschungszentrum Juelich GmbH, IEK-4 Plasmaphysik, Trilateral Euregio Cluster (TEC), 52425 Juelich, Max-Planck-Institut fuer Plasmaphysik, 17491 Greifswald, Germany, University of Antwerp, Universite d'Orleans, MKS Instruments RF Power Division, North Carolina State Univ, University of California - Berkeley, University of Illinois, Princeton Plasma Physics Laboratory, University of Alberta, Edmonton, Alberta T6G 2E1, Canada, Institute for Plasma and Atomic Physics, Ruhr University Bochum, 44780 Bochum, Germany, ABB Corporate Research, Switzerland, Nagoya Univ., Tokyo Electron Ltd., Huazhong University of Science & Technology, University of Tokyo, Shizuoka University, Kyushu University, Korea Adv Inst of Sci & Tech, Royal Military College of Canada, St. Petersburg Mining University, Russia, St.Petersburg Mining University, Russia, St.Petersburg State University, Russia, Prienceton Plasma Physics Laboratory, USA, Department of Physical Electronics, Masaryk University, Kotlarska 2, CZ-61137, Brno, Czech Republic, Masaryk University, Jozef Stefan Institute, Slovenia, University of Belgrade, Serbia, Faculty of Physics, Sofia University, Bulgaria, National Aerospace University, National University of Pharmacy, National Fusion Research Institute, Nagoya Univ, University of Tsukuba, Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, 91128 Palaiseau, FR, York Plasma Institute, Department of Physics, University of York, Heslington, YO10 5DQ, UK, Old Dominion University, CBM, UPR 4301 CNRS Orleans, France, GREMI UMR7344CNRS University of Orleans, France, FIRST, Tokyo Institute of Technology, Graduate School of Medicine, Kobe University, Tokyo Healthcare University Postgraduate School, IAP, Goethe-University, V.N. Karazin Kharkiv National University, INP Greifswald, 17489 Greifswald, Germany, Dutch Institute for Fundamental Energy Research, 5612 AJ Eindhoven, The Netherlands, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands, Department of Electrical Engineering, Hanyang University, Department of Electrical Engineering Hanyang University, Department of Nanoscale Semiconductor Engineering Hanyang University, Department of Electrical Engineering,Hanyang University, Lam Research Corporation, Sandia National Laboratories, Thermal/Fluid Component Sciences, Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, LPP, UMR 7648, Ecole Polytechnique, route de Saclay, 91128 Palaiseau Cedex, France, CEITEC, Masaryk University, Kotlarska 2, 61137 Brno, Czech Republic, CD-adapco, 200 Shepherds Bush Road, London W6 7NL, UK, Plasma Matters B.V., Ruhr university Bochum, Theoretical Electrical Engineering, Bochum, Germany, Department of Electrical Engineering, Pusan National University, Busan, Dublin City University, PPPL, Princeton University, FOM Institute DIFFER, None, IAP, Goethe-Univerity, Serbian Academy of Sciences and Arts, Knez Mihailova 35, 11000 Belgrade, Serbia, Department of Textiles, Faculty of Natural Sciences and Engineering, University of Ljubljana, Askerceva 12, 1000 Ljubljana, Slovenia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia, The University of Shiga Prefecture, Kyoto University, Institute for Electrical Engineering, Ruhr-University Bochum, Hungarian Academy of Sciences, Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum, Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany, Institute of Physics, University of Belgrade, Serbia, University of Nottingham, Plasma Technology Research Center, National Fusion Research Institute, Charles University in Prague, Prague 18000, Czech Republic, University of Pittsburgh, Pittsburgh, PA 15260, USA, University of Kentucky, Drake University, Caltech, USA, Cal State University Fullerton, USA, Universidad Nacional Aut\'onoma de M\'exico, Australian National University, Institute of Physics, Belgrade, Serbia, CSIC, Flinders University, James Cook University, Univ Nova de Lisboa, Tokyo Institute of Technology, Japan Aerospace Exploration Agency, University of Illinois at Urbana-Champaign, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Tohoku University, Dalian Maritime University, ONERA-The French Aerospace Lab, Mars-Space, Biomedical Applications of Plasma Tech., Ruhr Univ Bochum, Experimental Physics II, Ruhr Univ Bochum, Osaka University, Department of Electrical Engineering, Hanyang University, South Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, South Korea, Clausthal University of Technology, Sungkyunkwan University, National fusion research institute, Seikei University, Meijo university, Chiba Institute of Technology, PSEG, Dalian University of Technology, Shizuoka Univ, Department of Chemical Engineering, Nagoya University, Tokyo City University, Setagaya, Tokyo 158-8557, Japan, IAP, Goethe-University Frankfurt am Main, Chinese Culture University, National Chung Hsing University, Anhui University of Science and Technology, Huainan, China, Dalian University of Technology, INP Greifs\-wald, Eindhoven University of Technology, Dept.\ of Electr.\ Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, Department of Physics, West Virginia University, Morgantown, USA, Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany, Saga University, Department of Physics, West Virginia University, York Plasma Institute, Ecole Polytechnique, Northeastern University, School of Physics, Shenyang, Liaoning, CN, Anshan Normal University, School of Physics Science and Technology, Anshan, CN, Pusan Natl Univ, Kharkov National University, 61022, Kharkov, Svobody Sq. 4, Ukraine, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. 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• Measurement of Velocity Induced by a Propagating Arc Magnetohydrodynamic Plasma Actuator

  POSTER

  Authors

  • Young-Joon Choi

    The University of Texas at Austin, University of Texas at Austin

  • Miles Gray

    The University of Texas at Austin, University of Texas at Austin

  • Jayant Sirohi

    The University of Texas at Austin, University of Texas at Austin

  • Laxminarayan Raja

    The University of Texas at Austin, University of Texas at Austin, University of Texas

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• A Study of Impedance Relationships in Dual Frequency PECVD Process Plasma

  ORAL

  Authors

  • Douglas Keil

    Lam Research Corporation

  • Edward Augustyniak

    Lam Research Corporation

  • Yukinori Sakiyama

    Lam Research Corporation

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